Depth profile of implanted species with a detector telescope

Journal Article · Sun Sep 01 00:00:00 EDT 1996 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.1147450· OSTI ID:389511

Avasthi, D K; Kabiraj, D ^[1]; Jain, A ^[2]; Mehta, G K ^[1]

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1. Nuclear Science Centre, Aruna Asaf Ali Marg, New Delhi 110 067 (India)
2. ITMMEC, Indian Institute of Technology, Hauz Khas, New Delhi 110 016 (India)

Conventional elastic recoil detection analysis (ERDA) is considered to be an ideal nondestructive technique for depth profiling of implanted species of light mass elements in a material. The present work shows that it can lead to inaccurate misleading results in the cases where the implanted sample has surface impurity of nearby light mass element. It is also shown that the detector telescope behind the stopper foil in ERDA allows accurate profiling of implanted specimen as well as surface impurities simultaneously. {copyright} {ital 1996 American Institute of Physics.}

• OSTI ID: 389511
• Journal Information: Review of Scientific Instruments, Vol. 67, Issue 9; Other Information: PBD: Sep 1996
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
STAINLESS STEELS
TELESCOPE COUNTERS
NONDESTRUCTIVE ANALYSIS
ION IMPLANTATION
IMPURITIES
ION PROBES
NICKEL IONS
MEV RANGE 10-100
RECOILS
ELASTIC SCATTERING
BORON ADDITIONS
DEPTH PROFILES