Interfacial roughness and related growth mechanisms in sputtered W/Si multilayers
- Sektion Physik der Ludwig-Maximilians-Universitaet Muenchen, Geschwister-Scholl-Platz 1, 80539 Muenchen (Germany)
- European Synchrotron Radiation Facility, Boite Postale 220, 38043 Grenoble (France)
- Institut Lane-Langeuin, Boite Postale 156, 38043 Grenoble (France)
- Physikalisch-Technische Bundesanstalt, Bundesalle 100, 38116 Braunschweig (Germany)
We have studied interfacial roughness in amorphous W/Si multilayers grown by rf sputtering at different deposition parameters by cross-sectional transmission electron microscopy, x-ray reflectivity, and diffuse x-ray scattering. The diffuse scattering intensity has been recorded in an unprecedented wide range of parallel momentum transfer, 5{times}10{sup {minus}4} A{sup {minus}1}{le}{ital q}{sub {parallel}}{le}1 A{sup {minus}1}, giving access to the height-height self- and cross-correlation functions on lateral length scales between a few A and 1 {mu}m. The results are compared for the different samples and discussed in view of the deposition parameters. {copyright} {ital 1996 The American Physical Society.}
- OSTI ID:
- 383217
- Journal Information:
- Physical Review, B: Condensed Matter, Vol. 54, Issue 8; Other Information: PBD: Aug 1996
- Country of Publication:
- United States
- Language:
- English
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