Polyimide nanofoams from amorphous phase separated triblock copolymers

Conference · Tue Oct 01 04:00:00 EDT 1996

OSTI ID:370849

Miller, R D; Carter, K; Cha, H J ^[1]

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1. Almaden Research Center, San Jose, CA (United States); and others

Significant improvement in semiconductor device performance can be expected by decreasing the dielectric constant of the insulating media used as interlayer dielectrics and packaging materials. In this regard, organic and inorganic foams can have very low dielectric constants due to their significant void volumes. To be useful as dielectric materials, the foams must be stable at high temperatures, impermeable to corrosive reagents, show good mechanical properties, have a high glass transition temperature and contain voids which are small relative to the electronic features. We have prepared a number of polyimide nanofoams by the thermal decomposition of labile blocks in a phase separated morphology. The preparation of triblock polyimides and their conversion into nanofoams will be discussed. The thermal, mechanical and electrical properties of a variety of polyimide nanofoams well also be described.

• OSTI ID: 370849
• Report Number(s): CONF-960376--
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
DIELECTRIC MATERIALS
DIELECTRIC PROPERTIES
ELECTRICAL PROPERTIES
FOAMS
IMIDES
MECHANICAL PROPERTIES
MORPHOLOGY
ORGANIC POLYMERS