Thin-film characterization and flaw detection. Final report, February 1, 1993--November 31, 1997
The objectives were to determine the elastic constants of thin films deposited on substrates, to measure residual stress and to detect and characterize defects in thin film substrate configurations. There are many present and potential applications of configurations consisting of a thin film deposited on a substrate. Thin films that are deposited to improve the hardness and/or the thermal properties of surfaces were of principal interest in this work. Thin film technology does, however, also include high {Tc} superconductor films, films for magnetic recording, superlattices and films for band-gap engineering and quantum devices. The studies that were carried out on this project also have relevance to these applications. Both the film and the substrate are generally anisotropic. A line-focus acoustic microscope has been used to measure the speed of surface acoustic waves (SAW) in the thin film/substrate system. This microscope has unique advantages for measurements in anisotropic media. Analytical and numerical techniques have been employed to extract the desired information on the thin film from the measured SAW data. Results include: (1) analytical and numerical techniques for the direct problem and for inverse methods; (2) measurements of homogeneous and superlattice film constants; (3) investigation of the effect of surface roughness and (4) measurements of residual stresses.
- Research Organization:
- Northwestern Univ., Center for Quality Engineering and Failure Prevention, Evanston, IL (United States)
- Sponsoring Organization:
- USDOE Office of Energy Research, Washington, DC (United States)
- DOE Contract Number:
- FG02-86ER13484
- OSTI ID:
- 354989
- Report Number(s):
- DOE/ER/13484--001; ON: DE99003203
- Country of Publication:
- United States
- Language:
- English
Similar Records
Thin-film characterization and flaw detection. Progress report No. 7, February 1, 1993--January 31, 1994
Acoustic-microscopy measurements of the elastic properties of TiN/(V[sub [ital x]]Nb[sub 1[minus][ital x]])N superlattices
Effective elastic constants of superlattice films measured by line-focus acoustic microscopy
Technical Report
·
Tue Nov 23 23:00:00 EST 1993
·
OSTI ID:10107040
Acoustic-microscopy measurements of the elastic properties of TiN/(V[sub [ital x]]Nb[sub 1[minus][ital x]])N superlattices
Journal Article
·
Thu Jul 15 00:00:00 EDT 1993
· Physical Review, B: Condensed Matter; (United States)
·
OSTI ID:6460251
Effective elastic constants of superlattice films measured by line-focus acoustic microscopy
Journal Article
·
Sun Oct 01 00:00:00 EDT 1995
· Journal of Engineering Materials and Technology
·
OSTI ID:131516