Acoustic-microscopy measurements of the elastic properties of TiN/(V[sub [ital x]]Nb[sub 1[minus][ital x]])N superlattices

Journal Article · Thu Jul 15 04:00:00 EDT 1993 · Physical Review, B: Condensed Matter; (United States)

DOI:https://doi.org/10.1103/PhysRevB.48.1726· OSTI ID:6460251

Kim, J O; Achenbach, J D ^[1]; Mirkarimi, P B; Barnett, S A ^[2]

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1. Center for Quality Engineering and Failure Prevention, Northwestern University, Evanston, Illinois 60208-3020 (United States)
2. Department of Materials Science and Engineering, Northwestern University, Evanston, Illinois 60208-3108 (United States)

The elastic constants of (V[sub 0.6]Nb[sub 0.4])N and (V[sub 0.3]Nb[sub 0.7])N films have been determined from anisotropic surface acoustic wave (SAW) dispersion data measured by line-focus acoustic microscopy. Using the acoustic microscope, measurements of SAW velocities have also been carried out on the TiN/(V[sub 0.6]Nb[sub 0.4])N (001) and TiN/(V[sub 0.3]Nb[sub 0.7])N (001) and (111) superlattice films, all grown on cubic-crystalline MgO substrates. The phase velocities, measured as functions of the angle of propagation, display the expected anisotropic natures of (001) and (111) cubic symmetries. Dispersion curves of SAW's propagating along the symmetry axes have been obtained by measuring wave velocities for various film thicknesses and frequencies. From the elastic constants of homogeneous TiN, (V[sub 0.6]Nb[sub 0.4])N, and (V[sub 0.3]Nb[sub 0.7])N films, the effective elastic constants of TiN/(V[sub 0.6]Nb[sub 0.4])N and TiN/(V[sub 0.3]Nb[sub 0.7])N superlattice films and the corresponding phase velocities of SAW's have been calculated. The calculated dispersion curves show very good agreement with the experimental results. The dependence of the elastic properties of the superlattices on the TiN fraction, on the superlattice period, and on the crystallographic orientation has been investigated. The results show no elastic anomalies within measurement errors, indicating that previously reported hardness enhancements were not related to elastic property changes.

• DOE Contract Number: FG02-86ER13484
• OSTI ID: 6460251
• Journal Information: Physical Review, B: Condensed Matter; (United States), Journal Name: Physical Review, B: Condensed Matter; (United States) Vol. 48:3; ISSN PRBMDO; ISSN 0163-1829
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
360603* -- Materials-- Properties
ACOUSTIC MICROSCOPY
ALKALINE EARTH METAL COMPOUNDS
CHALCOGENIDES
DISPERSIONS
ELASTICITY
FILMS
FREQUENCY DEPENDENCE
MAGNESIUM COMPOUNDS
MAGNESIUM OXIDES
MECHANICAL PROPERTIES
MICROSCOPY
MIXTURES
NIOBIUM COMPOUNDS
NIOBIUM NITRIDES
NITRIDES
NITROGEN COMPOUNDS
OXIDES
OXYGEN COMPOUNDS
PNICTIDES
REFRACTORY METAL COMPOUNDS
SUPERLATTICES
TENSILE PROPERTIES
THIN FILMS
TITANIUM COMPOUNDS
TITANIUM NITRIDES
TRANSITION ELEMENT COMPOUNDS
VANADIUM COMPOUNDS
VANADIUM NITRIDES