Thin-film characterization and flaw detection. Progress report No. 7, February 1, 1993--January 31, 1994

Technical Report · Wed Nov 24 04:00:00 EST 1993

DOI:https://doi.org/10.2172/10107040· OSTI ID:10107040

Achenbach, J D

Objective is to determine the elastic constants of thin films deposited on substrates, measure residual stresses, and detect and characterize defects in thin film substrate configurations. A line-focus acoustic microscope is being used to measure speed of surface acoustic waves (SAW) in thin film/substrate system. V(z) curves (record of transducer voltage output (V) with variation of distance z between acoustic lens and specimen) were calculated in terms of characteristic functions of acoustic lens and reflectance function of fluid-loaded specimen, and were compared with data for isotropic, anisotropic, and layered anisotropic materials. For thin film/substrate of known elasticity, theoretical surface acoustic wave velocities agree with measured V(z) curves for full range of wave propagation directions. Results have been obtained for homogeneous nitride films and transition-metal nitride superlattice films.

• Research Organization: Northwestern Univ., Evanston, IL (United States). Center for Quality Engineering and Failure Prevention
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: FG02-86ER13484
• OSTI ID: 10107040
• Report Number(s): DOE/ER/13484--7; ON: DE94003952; BR: KC0401030
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
420500
ACOUSTIC MICROSCOPY
DEFECTS
DETECTION
ELASTICITY
MATERIALS TESTING
PROGRESS REPORT
RESIDUAL STRESSES
SUBSTRATES
SURFACE HARDENING
THIN FILMS