Accurate method for determining adhesion of cantilever beams

Journal Article · Thu Jul 01 00:00:00 EDT 1999 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.370809· OSTI ID:349342

de Boer, M P ^[1]; Michalske, T A ^[2]

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1. Intelligent Micromachining, Department 1725, MS 1080, Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)
2. Surface and Interface Science, Department 1114, MS 1413, Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)

Using surface micromachined samples, we demonstrate the accurate measurement of cantilever beam adhesion by using test structures which are adhered over long attachment lengths. We show that this configuration has a deep energy well, such that a fracture equilibrium is easily reached. When compared to the commonly used method of determining the shortest attached beam, the present method is much less sensitive to variations in surface topography or to details of capillary drying. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 349342
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 2 Vol. 86; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

40 CHEMISTRY
66 PHYSICS
ADHESION
BEAMS
COATINGS
FRACTURE MECHANICS
INTERFACES
INTERFEROMETRY
MACHINING
MEASURING METHODS
SURFACE ENERGY