Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Adhesion hysteresis of silane coated microcantilevers

Journal Article · · Acta Materials

The authors have developed a new experimental approach for measuring hysteresis in the adhesion between micromachined surfaces. By accurately modeling the deformations in cantilever beams that are subject to combined interfacial adhesion and applied electrostatic forces, they determine adhesion energies for advancing and receding contacts. They draw on this new method to examine adhesion hysteresis for silane coated micromachined structures and found significant hysteresis for surfaces that were exposed to high relative humidity (RH) conditions. Atomic force microscopy studies of these surfaces showed spontaneous formation of agglomerates that they interpreted as silages that have irreversibly transformed from uniform surface layers at low RH to isolated vesicles at high RH. They used contact deformation models to show that the compliance of these vesicles could reasonably account for the adhesion hysteresis that develops at high RH as the surfaces are forced into contact by an externally applied load.

Research Organization:
Sandia National Labs., Albuquerque, NM (US)
Sponsoring Organization:
US Department of Energy (US)
DOE Contract Number:
AC04-94AL85000
OSTI ID:
754006
Report Number(s):
SAND2000-0934J; 0000035109-000; 0000035109-000
Journal Information:
Acta Materials, Journal Name: Acta Materials
Country of Publication:
United States
Language:
English

Similar Records

Humidity Dependence of Adhesion for Silane Coated Microcantilevers
Journal Article · Mon Nov 08 23:00:00 EST 1999 · Langmuir · OSTI ID:14828

Adhesion of polysilicon microbeams in controlled humidity ambients
Technical Report · Tue Mar 31 23:00:00 EST 1998 · OSTI ID:658196

Fundamental mechanisms of micromachine reliability
Technical Report · Fri Dec 31 23:00:00 EST 1999 · OSTI ID:751346