Infrared and transmission electron microscopy studies of ion-implanted H in GaN

Journal Article · Mon Mar 01 04:00:00 EST 1999 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.369623· OSTI ID:324915

Seager, C H; Myers, S M; Petersen, G A; Han, J; Headley, T ^[1]

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1. Sandia National Laboratories, Albuquerque, New Mexico 87185 (United States)

H and D have been implanted into undoped films of GaN heteroepitaxially grown on sapphire over a dose range from 5{times}10{sup 15} to 5{times}10{sup 17} ions/cm{sup 2}. After a 600{degree}C post-implantation anneal, room temperature Fourier-transform-infrared spectroscopy reveals two major local vibrational modes at 3183 cm{sup {minus}1} (2364 cm{sup {minus}1}) and 3219 cm{sup {minus}1} (2386 cm{sup {minus}1}) for the H (D) material implanted at higher doses. The position and isotope shift (1.35) of these modes strongly suggest they are due to hydrogen bonded to nitrogen atoms; these atoms are located on the surfaces of seven sided cavities created by the H implant and thermal anneal cycle and identified by transmission electron microscopy. Nuclear reaction analyses of isochronally annealed D implanted films indicate that most of the deuterium remains bound within the implanted layer, and that the major release stage for D occurs near 900{degree}C. By contrast, the N{endash}H (N{endash}D) vibrational modes anneal out in the 750{endash}800{degree}C temperature range. These findings indicate that the bound H exists in at least two major states, believed to be IR-active N{endash}H on the cavity walls and IR-inactive H{sub 2} gas within the cavities. {copyright} {ital 1999 American Institute of Physics.}

• OSTI ID: 324915
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 5 Vol. 85; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
40 CHEMISTRY
ANNEALING
DEUTERIUM
GALLIUM COMPOUNDS
GALLIUM NITRIDES
HYDROGEN
INFRARED SPECTRA
ION IMPLANTATION
ISOTOPE EFFECTS
NUCLEAR REACTION ANALYSIS
SPECTRAL SHIFT
TRANSMISSION ELECTRON MICROSCOPY
VIBRATIONAL STATES