Hydrogen migration in phosphorous doped polycrystalline silicon
- Hahn-Meitner-Inst., Berlin (Germany)
Hydrogen diffusion in phosphorous doped polycrystalline silicon was investigated by deuterium diffusion experiments. The presence of phosphorous enhances hydrogen diffusion. For high hydrogen concentrations the activation energy of the effective diffusion-coefficient amounts to 0.25--0.35 eV. At low hydrogen concentrations diffusion is governed by deep traps that are present in an appreciable concentration of 6 {times} 10{sup 18}--10{sup 19} cm{sup {minus}3}. The hydrogen chemical-potential, {mu}{sub H}, decreases with increasing temperature at a rate of {approx}0.002 eV/K. The data are discussed in terms of a two-level model used to describe hydrogen diffusion in amorphous and undoped polycrystalline silicon.
- OSTI ID:
- 308105
- Report Number(s):
- CONF-980405--
- Country of Publication:
- United States
- Language:
- English
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