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Hydrogen transport in phosphorus and boron doped polycrystalline silicon

Conference ·
OSTI ID:20107918

Hydrogen diffusion in phosphorus and boron doped polycrystalline silicon was investigated by deuterium diffusion experiments. The presence of dopants enhances hydrogen diffusion. The effective diffusion coefficient D{sub eff} is thermally activated and the activation energy varies between 0.1 and 0.4 eV. This is accompanied by a variation of the diffusion prefactor by 12 orders of magnitude. Using the theoretical diffusion prefactor the actual energy {bar E}{sub A} was calculated from D{sub eff}. {bar E}{sub A} also depends strongly on the Fermi energy and exhibits a similar dependence as the formation energies of H{sup +} and H{sup {minus}} in single crystal silicon.

Research Organization:
Hahn-Meitner-Inst. Berlin (DE)
OSTI ID:
20107918
Country of Publication:
United States
Language:
English

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