High-Power Impulse Magnetron Sputter Deposition of Boron Carbide with Full-Face Erosion Magnetron and Mixed Ar-Ne Plasma

Taylor, George V.; Graiser, S.; Bayu Aji, L. B.; Shin, S. J.; Goodelman, D. C.; Lepro, Xavier; Kucheyev, S. O.

doi:10.1080/15361055.2025.2560729

High-Power Impulse Magnetron Sputter Deposition of Boron Carbide with Full-Face Erosion Magnetron and Mixed Ar-Ne Plasma

Journal Article · Mon Nov 10 00:00:00 EST 2025 · Fusion Science and Technology

DOI:https://doi.org/10.1080/15361055.2025.2560729· OSTI ID:3016226

^[1]; Graiser, S. ^[1]; Bayu Aji, L. B. ^[1]; Shin, S. J. ^[1]; ^[1]; ^[1]; Kucheyev, S. O. ^[1]

Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Boron carbide (B₄C) is an attractive inertial confinement fusion ablator material. The fabrication of B4C ablators by magnetron sputtering requires process optimization. To increase process flexibility, here we explore high-power impulse magnetron sputter (HiPIMS) deposition of B₄C in pure Ar and mixed Ar-Ne plasmas. Here, the results show that higher plasma discharge currents can be reached with a mixed Ar-Ne plasma in the entire working pressure range studied (5 𝑡𝑜 50 mTorr). At 45 mTorr with 10% of Ne in the Ar-Ne mix, high peak target current densities of ~1 A cm⁻² were demonstrated. Films deposited with such a mixed Ar-Ne plasma with a full-face erosion magnetron source on substrates biased at −25 V exhibited higher density and improved mechanical properties, albeit with higher compressive residual stresses compared to the case of HiPIMS deposition in a pure Ar plasma. This work demonstrates additional process flexibility of the HiPIMS discharge mode for the deposition of B₄C coatings.

View Accepted Manuscript (DOE)

Research Organization:: Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)

Sponsoring Organization:: USDOE National Nuclear Security Administration (NNSA)

Grant/Contract Number:: AC52-07NA27344

OSTI ID:: 3016226

Report Number(s):: LLNL--JRNL-2014952

Journal Information:: Fusion Science and Technology, Journal Name: Fusion Science and Technology; ISSN 1943-7641; ISSN 1536-1055

Publisher:: Taylor & FrancisCopyright Statement

Country of Publication:: United States

Language:: English

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