Absolute angular positioning in ultrahigh vacuum
Journal Article
·
· Review of Scientific Instruments
- Institut de Physique Experimentale, Ecole Polytechnique Federale de Lausanne, CH-1015 Lausanne (Switzerland)
Commercially available angular resolvers, which are routinely used in machine tools and robotics, are modified and adapted to be used under ultrahigh-vacuum (UHV) conditions. They provide straightforward and reliable measurements of angular positions for any kind of UHV sample manipulators. The corresponding absolute reproducibility is on the order of 0.005{degree}, whereas the relative resolution is better than 0.001{degree}, as demonstrated by high-resolution helium-reflectivity measurements. The mechanical setup and possible applications are discussed. {copyright} {ital 1996 American Institute of Physics.}
- OSTI ID:
- 284112
- Journal Information:
- Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 5 Vol. 67; ISSN 0034-6748; ISSN RSINAK
- Country of Publication:
- United States
- Language:
- English
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