Quartz microbalance device for transfer into ultrahigh vacuum systems

Journal Article · Wed Oct 15 04:00:00 EDT 2008 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.2992477· OSTI ID:21266460

Stavale, F; Achete, C A ^[1]; Niehus, H ^[1]

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1. Divisao de Metrologia de Materiais (DIMAT), Inmetro, CEP 25250-020, Xerem, Duque de Caxias, Rio de Janeiro (Brazil)

An uncomplicated quartz microbalance device has been developed which is transferable into ultrahigh vacuum (UHV) systems. The device is extremely useful for flux calibration of different kinds of material evaporators. Mounted on a commercial specimen holder, the device allows fast quartz microbalance transfer into the UHV and subsequent positioning exactly to the sample location where subsequent thin film deposition experiments shall be carried out. After backtransfer into an UHV sample stage, the manipulator may be loaded in situ with the specimen suited for the experiment. The microbalance device capability is demonstrated for monolayer and submonolayer vanadium depositions with an achieved calibration sensitivity of less the 0.001 ML coverage.

• OSTI ID: 21266460
• Journal Information: Review of Scientific Instruments, Journal Name: Review of Scientific Instruments Journal Issue: 10 Vol. 79; ISSN 0034-6748; ISSN RSINAK
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
CALIBRATION
EVAPORATORS
MANIPULATORS
MICROBALANCES
POSITIONING
QUARTZ
SAMPLE HOLDERS
SENSITIVITY
THIN FILMS
VACUUM COATING
VANADIUM