Near-plastic threshold indentation and the residual stress in thin films

Conference · Mon Jul 01 04:00:00 EDT 1996

OSTI ID:266734

Houston, J E; Michalske, T A

In recent studies, the authors used the Interfacial Force Microscope in a nanoindenter mode to survey the nanomechanical properties of Au films grown on various substrates. Quantitative tabulations of the indentation modulus and the maximum shear stress at the plastic threshold showed consistent values over individual samples but a wide variation from substrate to substrate. These values were compared with film properties such as the surface roughness, average grain size and interfacial adhesion and no correlation was found. However, in a subsequent analysis of the results, they found consistencies which support the integrity of the data and point to the fact that the results are sensitive to some property of the various film/substrate combinations. In the present paper, they discuss these consistencies and show recent measurements which strongly suggest that the property that is being probed is the residual stress in the films caused by their interaction with the substrate surfaces.

• Research Organization: Sandia National Labs., Albuquerque, NM (United States)
• Sponsoring Organization: USDOE, Washington, DC (United States)
• DOE Contract Number: AC04-94AL85000
• OSTI ID: 266734
• Report Number(s): SAND--96-1743C; CONF-960401--62; ON: DE96012936
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
42 ENGINEERING
DATA
GOLD
MATERIALS TESTING
MICROSCOPY
PLASTICITY
PROBES
RESIDUAL STRESSES
THIN FILMS
TUNGSTEN