High-performance, transparent conducting oxides based on cadmium stannate

Journal Article · Sat Jun 01 04:00:00 EDT 1996 · Journal of Electronic Materials

DOI:https://doi.org/10.1007/BF02666727· OSTI ID:263167

Coutts, T J; Wu, X; Mulligan, W P; Webb, J M ^[1]

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1. National Renewable Energy Lab., Golden, CO (United States)

We discuss the modeling of thin films of transparent conducting oxides and we compare the predictions with the observed properties of cadmium stannate. Thin films of this material were deposited using radio-frequency magnetron sputtering. The Drude free-carrier model is used to model the optical and electrical properties. The model demonstrates the need for high mobilities. The free-carrier absorbance in the visible spectrum is used as a comparative figure-of-merit for cadmium stannate and tin oxide. This shows that free-carrier absorbance is much less in cadmium stannate than in tin oxide. X-ray diffraction shows that annealed films consist of a single-phase spinel structure. The post-deposition annealing sequence is shown to be crucial to forming a single phase, which is vital for optimal optical and electrical properties. The films are typically high mobility (up to 65 cm{sup 2}V{sup -1}s{sup -1}) and have carrier concentrations as high as 10{sup 21} cm{sup -3}. Resistivities are as low as 1.3 10{sup -4} {Omega} cm, the lowest values reported for cadmium stannate. Atomic force microscopy indicates that the root-mean-square surface roughness is approximately {+-}15A. Cadmium stannate etches readily in both hydrofluoric and hydrochloric acid, which is a commanding advantage over tin oxide. 11 refs., 15 figs.

• Sponsoring Organization: USDOE
• OSTI ID: 263167
• Journal Information: Journal of Electronic Materials, Journal Name: Journal of Electronic Materials Journal Issue: 6 Vol. 25; ISSN JECMA5; ISSN 0361-5235
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
99 GENERAL AND MISCELLANEOUS
CADMIUM STANNATES
ELECTRIC CONDUCTIVITY
ELECTRICAL PROPERTIES
MATHEMATICAL MODELS
OPACITY
OPTICAL PROPERTIES
OPTICAL REFLECTION
OXIDES
THIN FILMS
TIN COMPOUNDS
X-RAY SPECTRA