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U.S. Department of Energy
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Pathfinding Process Development for the Realization of Atomic Precision Advanced Manufacturing (APAM)-Based Vertical Tunneling Field Effect Transistors for Enhanced Energy Efficiency

Conference ·
DOI:https://doi.org/10.2172/2586375· OSTI ID:2586375
Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
Advanced Manufacturing Office
DOE Contract Number:
NA0003525
OSTI ID:
2586375
Report Number(s):
SAND2024-06396C; 1745892
Country of Publication:
United States
Language:
English

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