MEMS nanopositioner and method of fabrication
Patent
·
OSTI ID:2542112
A microelectromechanical (MEMS) device is provided. The MEMS device comprises a substrate and a movable structure flexurally connected to the substrate, capable of moving in relation to the substrate, wherein the movable structure further comprising two or more segments having at least one mechanical connection between said segments to provide structural integrity of the moving structure; and wherein the at least one mechanical connection electrically isolates at least two segments.
- Research Organization:
- Univ. of Texas, Austin, TX (United States)
- Sponsoring Organization:
- USDOE
- DOE Contract Number:
- EE0008322;
- Assignee:
- Board of Regents, The University of Texas System (Austin, TX)
- Patent Number(s):
- 11,973,441
- Application Number:
- 17/645,229
- OSTI ID:
- 2542112
- Country of Publication:
- United States
- Language:
- English
A high bandwidth microelectromechanical system-based nanopositioner for scanning tunneling microscopy
|
journal | July 2019 |
MEMS for Nanopositioning: Design and Applications
|
journal | June 2017 |
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