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Microscale sensors for direct metrology of additively manufactured features

Patent ·
OSTI ID:1600201
; ; ;
This invention relates to a microelectromechanical device for mechanical characterization of a specimen. In one embodiment the device may incorporate a substrate, at least one first flexure bearing and at least one second flexure bearing, both being supported on the substrate. First and second movable shuttles may be used which are supported above the substrate by the flexure bearings so that each is free to move linearly relative to the substrate. Ends of the movable shuttles are separated by a gap. A thermal actuator may be connected to one end of the first movable shuttle, and operates to cause the first movable shuttle to move in a direction parallel to the surface of the substrate in response to a signal applied to the thermal actuator. A first capacitive sensor may be formed between the first movable shuttle and the substrate, and a second capacitive sensor formed between the second movable shuttle and the substrate.
Research Organization:
Lawrence Livermore National Laboratory (LLNL), Livermore, CA (United States)
Sponsoring Organization:
USDOE
DOE Contract Number:
AC52-07NA27344
Assignee:
Lawrence Livermore National Security, LLC (Livermore, CA); Board of Regents, The University of Texas System (Austin, TX)
Patent Number(s):
10,451,539
Application Number:
15/910,604
OSTI ID:
1600201
Country of Publication:
United States
Language:
English

References (11)

MEMS for In Situ Testing—Handling, Actuation, Loading, and Displacement Measurements journal May 2010
Push-to-pull tensile testing of ultra-strong nanoscale ceramic–polymer composites made by additive manufacturing journal June 2015
Stiction in surface micromachining journal December 1996
Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films journal January 2013
Young’s modulus measurement of two-photon polymerized micro-cantilevers by using nanoindentation equipment journal November 2012
Dynamic Actuation of Soft 3D Micromechanical Structures Using Micro-Electromechanical Systems (MEMS) journal January 2018
Controlling Young’s modulus of polymerized structures fabricated by direct laser writing journal September 2014
Design and Operation of a MEMS-Based Material Testing System for Nanomechanical Characterization journal October 2007
An electromechanical material testing system for in situ electron microscopy and applications journal September 2005
A thermal actuator for nanoscale in situ microscopy testing: design and characterization journal January 2006
A microelectromechanical load sensor for in situ electron and x-ray microscopy tensile testing of nanostructures journal December 2004

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Related Subjects

36 MATERIALS SCIENCE