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Thermodynamics of the Si-O-N system. 1: High-temperature study of the vaporization behavior of silicon nitride by mass spectrometry

Journal Article · · Journal of the American Ceramic Society
; ;  [1]
  1. E.N.S.E.E.G., Saint Martin d`Heres (France). Lab. de Thermodynamique et Physico-Chimie Metallurgiques
Si{sub 3}N{sub 4}(s) powders are vaporized in effusion cells, and the gaseous phase, analyzed by mass spectrometry, is composed of N{sub 2}, Si, Si{sub 2}, Si{sub 3}, SiN, and Si{sub 2}N. Owing to retarding vaporization of N{sub 2}, effusion cells with different orifice sizes are used in order to determine the evaporation coefficient for this species, which is then compared with previous Knudsen or Langmuir studies. Enthalpies of formation for SiN(g) and Si{sub 2}N(g) are determined.
Sponsoring Organization:
USDOE
OSTI ID:
253573
Journal Information:
Journal of the American Ceramic Society, Journal Name: Journal of the American Ceramic Society Journal Issue: 5 Vol. 79; ISSN 0002-7820; ISSN JACTAW
Country of Publication:
United States
Language:
English

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