Ring-field EUVL camera with large etendu
Conference
·
OSTI ID:247418
These scanning cameras with large instantaneous fields make efficient use of the new, 300 nm diameter, debris-less laser-plasma sources while printing 100 nm features.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 247418
- Report Number(s):
- SAND--95-2726C; CONF-960493--9; ON: DE96010535
- Country of Publication:
- United States
- Language:
- English
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