Illuminators for extreme ultraviolet lithography cameras with ring fields
Conference
·
OSTI ID:10134858
Scanning, ring-field lithographic cameras designed for 14-nm radiation can print 100-nm features on large chips. Mating high-efficiency illuminators are described.
- Research Organization:
- Sandia National Labs., Albuquerque, NM (United States)
- Sponsoring Organization:
- USDOE, Washington, DC (United States)
- DOE Contract Number:
- AC04-94AL85000
- OSTI ID:
- 10134858
- Report Number(s):
- SAND--94-0236C; CONF-9406116--3; ON: DE94008423; BR: GB0103012
- Country of Publication:
- United States
- Language:
- English
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