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Role of step and terrace nucleation in heteroepitaxial growth morphology: growth kinetics of CaF{sub 2}/Si(111)

Journal Article · · Physical Review Letters
; ;  [1]
  1. Department of Physics, University of Washington, Box 35-1560, Seattle, Washington 98195-1560 (United States)
The thickness uniformity and the spatial distribution of lattice relaxation in thin ({lt}8 nm) CaF{sub 2}/Si(111) films, observed with photoelectron spectroscopy and transmission electron microscopy, are seen to depend strongly on the initial nucleation kinetics. We develop a general model for heteroepitaxial growth that explains both these and literature results. Terrace or step nucleation leads to laminar films, although with different relaxation patterns; combined step and terrace nucleation leads to rough films due to different upper-layer nucleation rates on the differently sized islands.
Research Organization:
Lawrence Berkeley National Laboratory
DOE Contract Number:
AC03-76SF00098; FG06-94ER45516
OSTI ID:
239435
Journal Information:
Physical Review Letters, Journal Name: Physical Review Letters Journal Issue: 12 Vol. 75; ISSN 0031-9007; ISSN PRLTAO
Country of Publication:
United States
Language:
English

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