Surfactant enhanced solid phase epitaxy of Ge/CaF{sub 2}/Si(111): Synchrotron x-ray characterization of structure and morphology

Journal Article · Tue Nov 15 04:00:00 EST 2011 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.3661174· OSTI ID:22036766

Wollschlaeger, J ^[1]; Deiter, C ^[2]; Wang, C R; Mueller, B H; Hofmann, K R ^[3]

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1. Fachbereich Physik, Universiaet Osnabrueck, Barbarastrasse 7, Osnabrueck D-49069 (Germany)
2. Deutsches Elektronen Synchrotron (DESY), Notkestr. 85, Hamburg (Germany)
3. Institute of Electronic Materials and Devices, Leibniz Universitaet Hannover, Schneiderberg 32, Hannover D-30167 (Germany)

The structure and morphology of CaF{sub 2}/Si(111) and Ge/CaF{sub 2}/Si(111) layered structures with film thicknesses in the range of very few nanometers has been studied with synchrotron-based radiation. While the CaF{sub 2} film is grown via molecular beam epitaxy, the Ge film is fabricated by surfactant enhanced solid phase epitaxy with Sb as surfactant. The CaF{sub 2} film forms two laterally separated phases of relaxed CaF{sub 2} and pseudomorphic CaF{sub 2}, respectively, although the film thickness is very homogeneous. The Ge film is completely relaxed and forms A-oriented parts as well as B-oriented parts, due to twinning. In spite of the large surface roughness of the Ge film, it completely wets CaF{sub 2}/Si(111) also after annealing at 600 deg. C, due to the application of Sb during the annealing process.

• OSTI ID: 22036766
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 10 Vol. 110; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
ANTIMONY
CALCIUM
CALCIUM FLUORIDES
CRYSTAL STRUCTURE
GERMANIUM
INTERFACES
MOLECULAR BEAM EPITAXY
MOLECULAR STRUCTURE
MORPHOLOGY
REFLECTION
ROUGHNESS
SEMICONDUCTOR MATERIALS
SILICON
SOLIDS
SURFACES
SYNCHROTRON RADIATION
THIN FILMS
TWINNING
X-RAY DIFFRACTION