Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Bringing high-efficiency silicon solar cells with heterojunction contacts to market with a new, versatile deposition technique

Technical Report ·
DOI:https://doi.org/10.2172/2322405· OSTI ID:2322405
 [1]
  1. Arizona State University, Tempe, AZ (United States); Arizona State University
Silicon heterojunction (SHJ) and tunnel-oxide-passivated-contacts (TOPCon) solar cells are the future for silicon technology after passivated-emitter-and-rear-contact (PERC) cells. However, the tool costs (CapEx) for SHJ (TOPCon) make the cell lines more than 2 (1.5) times of the cost of the PERC, which hinders the wide adoption these new technologies despite higher efficiencies. A common challenge for both cell types is that the passivation layers are sensitive to sputter damage. Furthermore, for TOPCon cells, it is desirable to have an inline (instead of batch) process for tunnel oxide and polysilicon to maximize the throughput and thus reduce the operation cost.
Research Organization:
Arizona State University, Tempe, AZ (United States)
Sponsoring Organization:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Renewable Power Office. Solar Energy Technologies Office
DOE Contract Number:
EE0008553
OSTI ID:
2322405
Report Number(s):
DOE-ASU--8553
Country of Publication:
United States
Language:
English