CVD diamond resistor as heater and temperature sensor
Conference
·
OSTI ID:230028
- Michigan State Univ., East Lansing, MI (United States)
Heat generation and temperature control, essential for most heater applications, require different components in a conventional system. We achieve the heat generation and temperature measurement simultaneously by using a single diamond resistor. Chemical vapor deposited (CVD) p-type diamond resistors with different dimensions were fabricated on polycrystalline diamond or oxidized Si substrates using diamond film technology compatible with integrated circuit (IC) processing. The temperature response of the resistors was characterized in the temperature range of 25 - 500{degrees}C. Power densities in access of 600 watt/in{sup 2} were achieved.
- OSTI ID:
- 230028
- Report Number(s):
- CONF-950840--
- Country of Publication:
- United States
- Language:
- English
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