Single-structure heater and temperature sensor using a p-type polycrystalline diamond resistor

Journal Article · Wed May 01 04:00:00 EDT 1996 · IEEE Electron Device Letters

DOI:https://doi.org/10.1109/55.491845· OSTI ID:231100

Yang, G S; Aslam, D M ^[1]

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1. Michigan State Univ., East Lansing, MI (United States). Dept. of Electrical Engineering

Heat generation and temperature sensing are required for heating applications and for liquid level sensors, mass flow meters, and vacuum and pressure gauges which are based on variations of heat dissipation. Heat generation and temperature sensing are reported in a single p-type diamond resistor fabricated on an oxidized Si substrate using diamond film technology compatible with integrated circuit (IC) processing. Power densities in excess of 600 W/in.{sup 2} are observed for the heaters. The temperature response of the sensor is characterized in the temperature range of 300--725 K. Such a diamond heater/sensor device is reported for the first time.

• OSTI ID: 231100
• Journal Information: IEEE Electron Device Letters, Journal Name: IEEE Electron Device Letters Journal Issue: 5 Vol. 17; ISSN EDLEDZ; ISSN 0741-3106
• Country of Publication: United States
• Language: English

Related Subjects

44 INSTRUMENTATION
INCLUDING NUCLEAR AND PARTICLE DETECTORS
FLOWMETERS
LEVEL INDICATORS
MEASURING INSTRUMENTS
PRESSURE GAGES
SEMICONDUCTOR RESISTORS
SILICON
TEMPERATURE MONITORING