Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Changes in the Photoluminescence Properties of Semiconductor Heterostructures after Ion-Beam Etching

Journal Article · · Semiconductors

The ion-beam etching of AlGaAs/GaAs heterostructures gives rise to radiation defects and, as a result, leads to photoluminescence quenching. Annealing at 620°C in an atmosphere of As almost completely restores the quantum efficiency of photoluminescence in the case of radiation-induced defects lying at a distance of up to 150 nm from the heterointerface.

OSTI ID:
22944759
Journal Information:
Semiconductors, Journal Name: Semiconductors Journal Issue: 11 Vol. 53; ISSN SMICES; ISSN 1063-7826
Country of Publication:
United States
Language:
English