Tunable doping of carbon nanotubes through engineered atomic layer deposition

Tunable doping of carbon nanotubes through engineered atomic layer deposition

Patent · Mon Nov 27 23:00:00 EST 2023

OSTI ID:2293932

A carbon nanotube field effect transistor (CNFET), that has a channel formed of carbon nanotubes (CNTs), includes a layered deposit of a nonstoichiometric doping oxide (NDO), such as HfOX, where the concentration of the NDO varies through the thickness of the layer(s). An n-type metal-oxide semiconductor (NMOS) CNFET made in this manner can achieve similar ON-current, OFF-current, and/or threshold voltage magnitudes to a corresponding p-type metal-oxide semiconductor (PMOS) CNFET. Such an NMOS and PMOS can be used to achieve a symmetric complementary metal-oxide semiconductor (CMOS) CNFET design.

View Patent

Research Organization:: Massachusetts Inst. of Technology (MIT), Cambridge, MA (United States)

Sponsoring Organization:: USDOE

Assignee:: Massachusetts Institute of Technology (Cambridge, MA)

Patent Number(s):: 11,832,458

Application Number:: 17/211,329

OSTI ID:: 2293932

Country of Publication:: United States

Language:: English

References (113)

Highly conductive metal gate fill integration solution for extremely scaled RMG stack for 5 nm & beyond Yoshida, N.; Hassan, S.; Tang, W. 2017 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2017.8268439	conference	December 2017
Mortality, Attributable Mortality, and Clinical Events as End Points for Clinical Trials of Ventilator‐Associated Pneumonia and Hospital‐Acquired Pneumonia Muscedere, John G.; Day, Andrew; Heyland, Daren K. Clinical Infectious Diseases, Vol. 51, Issue S1 https://doi.org/10.1086/653060	journal	August 2010
Impact of inappropriate antibiotic therapy on mortality in patients with ventilator-associated pneumonia and blood stream infection: A meta-analysis Kuti, Effie L.; Patel, Aarti A.; Coleman, Craig I. Journal of Critical Care, Vol. 23, Issue 1 https://doi.org/10.1016/j.jcrc.2007.08.007	journal	March 2008
Arrays of single-walled carbon nanotubes with full surface coverage for high-performance electronics Cao, Qing; Han, Shu-jen; Tulevski, George S. Nature Nanotechnology, Vol. 8, Issue 3 https://doi.org/10.1038/nnano.2012.257	journal	January 2013
Hyperdimensional Computing Exploiting Carbon Nanotube FETs, Resistive RAM, and Their Monolithic 3D Integration Wu, Tony F.; Li, Haitong; Huang, Ping-Chen IEEE Journal of Solid-State Circuits, Vol. 53, Issue 11 https://doi.org/10.1109/JSSC.2018.2870560	journal	November 2018
The volatile metabolic fingerprint of ventilator-associated pneumonia Bos, Lieuwe D. J.; Martin-Loeches, Ignacio; Kastelijn, Janine B. Intensive Care Medicine, Vol. 40, Issue 5 https://doi.org/10.1007/s00134-014-3260-5	journal	March 2014
Sub-10 nm Carbon Nanotube Transistor Franklin, Aaron D.; Luisier, Mathieu; Han, Shu-Jen Nano Letters, Vol. 12, Issue 2 https://doi.org/10.1021/nl203701g	journal	January 2012
Modern microprocessor built from complementary carbon nanotube transistors Hills, Gage; Lau, Christian; Wright, Andrew Nature, Vol. 572, Issue 7771 https://doi.org/10.1038/s41586-019-1493-8	journal	August 2019
Growing highly pure semiconducting carbon nanotubes by electrotwisting the helicity Wang, Jiangtao; Jin, Xiang; Liu, Zebin Nature Catalysis, Vol. 1, Issue 5 https://doi.org/10.1038/s41929-018-0057-x	journal	April 2018
Solution-processed carbon nanotubes based transistors with current density of 1.7 mA/μm and peak transconductance of 0.8 mS/μm Zhong, Donglai; Xiao, Mengmeng; Zhang, Zhiyong 2017 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2017.8268335	conference	December 2017
Efficient metallic carbon nanotube removal for highly-scaled technologies Shulaker, Max M.; Hills, Gage; Wu, Tony F. 2015 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2015.7409815	conference	December 2015
High-performance carbon nanotube field-effect transistors Shulaker, Max M.; Pitner, Gregory; Hills, Gage 2014 IEEE International Electron Devices Meeting https://doi.org/10.1109/IEDM.2014.7047164	conference	December 2014
Electronic nose analysis of bronchoalveolar lavage fluid Humphreys, Lee; Orme, Robert M. L’E.; Moore, Philippa European Journal of Clinical Investigation, Vol. 41, Issue 1 https://doi.org/10.1111/j.1365-2362.2010.02376.x	journal	September 2010
Power aware FinFET and lateral nanosheet FET targeting for 3nm CMOS technology Yakimets, D.; Bardon, M. Garcia; Jang, D. 2017 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2017.8268429	conference	December 2017
Medium-scale carbon nanotube thin-film integrated circuits on flexible plastic substrates Cao, Qing; Kim, Hoon-sik; Pimparkar, Ninad Nature, Vol. 454, Issue 7203, p. 495-500 https://doi.org/10.1038/nature07110	journal	July 2008
End-bonded contacts for carbon nanotube transistors with low, size-independent resistance Cao, Qing; Han, Shu-Jen; Tersoff, Jerry Science, Vol. 350, Issue 6256 https://doi.org/10.1126/science.aac8006	journal	October 2015
High-Performance Carbon Nanotube Complementary Electronics and Integrated Sensor Systems on Ultrathin Plastic Foil Zhang, Heng; Xiang, Li; Yang, Yingjun ACS Nano, Vol. 12, Issue 3 https://doi.org/10.1021/acsnano.7b09145	journal	January 2018
High-speed logic integrated circuits with solution-processed self-assembled carbon nanotubes Han, Shu-Jen; Tang, Jianshi; Kumar, Bharat Nature Nanotechnology, Vol. 12, Issue 9 https://doi.org/10.1038/nnano.2017.115	journal	July 2017
A non-iterative compact model for carbon nanotube FETs incorporating source exhaustion effects Wei, Lan; Frank, David J.; Chang, Leland 2009 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2009.5424281	conference	December 2009
Sub-10 nm diameter InGaAs vertical nanowire MOSFETs Zhao, X.; Heidelberger, C.; Fitzgerald, E. A. 2017 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2017.8268407	conference	December 2017
Upside-down FETS La Tulipe, D. C.; Frnak, D. J.; Steen, S. E. 2008 IEEE International SOI Conference https://doi.org/10.1109/SOI.2008.4656276	conference	October 2008
Science and research policy at the end of Moore’s law Khan, Hassan N.; Hounshell, David A.; Fuchs, Erica R. H. Nature Electronics, Vol. 1, Issue 1 https://doi.org/10.1038/s41928-017-0005-9	journal	January 2018
Novel Isoprene Sensor for a Flu Virus Breath Monitor Gouma, Pelagia-Irene; Wang, Lisheng; Simon, Sanford Sensors, Vol. 17, Issue 12 https://doi.org/10.3390/s17010199	journal	January 2017
Highly Uniform and Stable n-Type Carbon Nanotube Transistors by Using Positively Charged Silicon Nitride Thin Films Ha, Tae-Jun; Chen, Kevin; Chuang, Steven Nano Letters, Vol. 15, Issue 1 https://doi.org/10.1021/nl5037098	journal	December 2014
Solution-processed carbon nanotube thin-film complementary static random access memory Geier, Michael L.; McMorrow, Julian J.; Xu, Weichao Nature Nanotechnology, Vol. 10, Issue 11 https://doi.org/10.1038/nnano.2015.197	journal	September 2015
A Compact Virtual-Source Model for Carbon Nanotube FETs in the Sub-10-nm Regime—Part I: Intrinsic Elements Lee, C. -S.; Pop, E.; Franklin, A. D. IEEE Transactions on Electron Devices, Vol. 62, Issue 9 https://doi.org/10.1109/TED.2015.2457453	journal	September 2015
Understanding Energy Efficiency Benefits of Carbon Nanotube Field-Effect Transistors for Digital VLSI Hills, Gage; Bardon, Marie Garcia; Doornbos, Gerben IEEE Transactions on Nanotechnology, Vol. 17, Issue 6 https://doi.org/10.1109/TNANO.2018.2871841	journal	November 2018
Memory leads the way to better computing Wong, H. -S. Philip; Salahuddin, Sayeef Nature Nanotechnology, Vol. 10, Issue 3 https://doi.org/10.1038/nnano.2015.29	journal	March 2015
Overcoming scaling barriers through design technology CoOptimization Liebmann, Lars 2016 IEEE Symposium on VLSI Technology https://doi.org/10.1109/VLSIT.2016.7573398	conference	June 2016
Monolithic three-dimensional integration of carbon nanotube FETs with silicon CMOS Shulaker, Max M.; Saraswat, Krishna; Wong, H. -S. Philip 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers https://doi.org/10.1109/VLSIT.2014.6894422	conference	June 2014
Toward High-Performance Digital Logic Technology with Carbon Nanotubes Tulevski, George S.; Franklin, Aaron D.; Frank, David ACS Nano, Vol. 8, Issue 9 https://doi.org/10.1021/nn503627h	journal	August 2014
Polyfluorene-Sorted, Carbon Nanotube Array Field-Effect Transistors with Increased Current Density and High On/Off Ratio Brady, Gerald J.; Joo, Yongho; Wu, Meng-Yin ACS Nano, Vol. 8, Issue 11, p. 11614-11621 https://doi.org/10.1021/nn5048734	journal	November 2014
Subnanowatt Carbon Nanotube Complementary Logic Enabled by Threshold Voltage Control Geier, Michael L.; Prabhumirashi, Pradyumna L.; McMorrow, Julian J. Nano Letters, Vol. 13, Issue 10 https://doi.org/10.1021/nl402478p	journal	September 2013
A review on recent advances of CNTs as gas sensors Rana, Md. Masud; Ibrahim, Dauda Sh.; Mohd Asyraf, M. R. Sensor Review, Vol. 37, Issue 2 https://doi.org/10.1108/SR-10-2016-0230	journal	March 2017
Three-dimensional integration of nanotechnologies for computing and data storage on a single chip Shulaker, Max M.; Hills, Gage; Park, Rebecca S. Nature, Vol. 547, Issue 7661 https://doi.org/10.1038/nature22994	journal	July 2017
Carbon nanotube correlation Zhang, Jie; Bobba, Shashikanth; Patil, Nishant Proceedings of the 47th Design Automation Conference https://doi.org/10.1145/1837274.1837497	conference	June 2010
3D monolithic integration: Technological challenges and electrical results Vinet, M.; Batude, P.; Tabone, C. Microelectronic Engineering, Vol. 88, Issue 4 https://doi.org/10.1016/j.mee.2010.10.022	journal	April 2011
Linear Increases in Carbon Nanotube Density Through Multiple Transfer Technique Shulaker, Max M.; Wei, Hai; Patil, Nishant Nano Letters, Vol. 11, Issue 5, p. 1881-1886 https://doi.org/10.1021/nl200063x	journal	May 2011
Air Stable Doping and Intrinsic Mobility Enhancement in Monolayer Molybdenum Disulfide by Amorphous Titanium Suboxide Encapsulation Rai, Amritesh; Valsaraj, Amithraj; Movva, Hema C. P. Nano Letters, Vol. 15, Issue 7 https://doi.org/10.1021/acs.nanolett.5b00314	journal	June 2015
The diagnostic dilemma of ventilator-associated pneumonia in critically ill children* Venkatachalam, Vani; Hendley, J. Owen; Willson, Douglas F. Pediatric Critical Care Medicine, Vol. 12, Issue 3 https://doi.org/10.1097/PCC.0b013e3181fe2ffb	journal	May 2011
Ventilator-Associated Pneumonia: Diagnosis, Treatment, and Prevention Koenig, Steven M.; Truwit, Jonathon D. Clinical Microbiology Reviews, Vol. 19, Issue 4 https://doi.org/10.1128/CMR.00051-05	journal	October 2006
Extreme scaling enabled by 5 tracks cells: Holistic design-device co-optimization for FinFETs and lateral nanowires Bardon, M. Garcia; Sherazi, Y.; Schuddinck, P. 2016 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2016.7838497	conference	December 2016
Carbon Nanotube Transistor Circuits: Circuit-Level Performance Benchmarking and Design Options for Living with Imperfections Deng, Jie; Patil, Nishant; Ryu, Koungmin 2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers https://doi.org/10.1109/ISSCC.2007.373592	conference	February 2007
Room-temperature transistor based on a single carbon nanotube Tans, Sander J.; Verschueren, Alwin R. M.; Dekker, Cees Nature, Vol. 393, Issue 6680 https://doi.org/10.1038/29954	journal	May 1998
Carbon Nanotube Complementary Wrap-Gate Transistors Franklin, Aaron D.; Koswatta, Siyuranga O.; Farmer, Damon B. Nano Letters, Vol. 13, Issue 6 https://doi.org/10.1021/nl400544q	journal	May 2013
Carbon Nanotube Circuit Integration up to Sub-20 nm Channel Lengths Shulaker, Max Marcel; Van Rethy, Jelle; Wu, Tony F. ACS Nano, Vol. 8, Issue 4 https://doi.org/10.1021/nn406301r	journal	March 2014
Carbon Nanotubes for High-Performance Electronics—Progress and Prospect Appenzeller, J. Proceedings of the IEEE, Vol. 96, Issue 2 https://doi.org/10.1109/JPROC.2007.911051	journal	February 2008
ACCNT—A Metallic-CNT-Tolerant Design Methodology for Carbon-Nanotube VLSI: Concepts and Experimental Demonstration Lin, Albert; Patil, Nishant; Wei, Hai IEEE Transactions on Electron Devices, Vol. 56, Issue 12 https://doi.org/10.1109/TED.2009.2033168	journal	December 2009
Understanding contact gating in Schottky barrier transistors from 2D channels Prakash, Abhijith; Ilatikhameneh, Hesameddin; Wu, Peng Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-12816-3	journal	October 2017
MoS2 transistors with 1-nanometer gate lengths Desai, S. B.; Madhvapathy, S. R.; Sachid, A. B. Science, Vol. 354, Issue 6308 https://doi.org/10.1126/science.aah4698	journal	October 2016
Molecular analysis of volatile metabolites released specifically by staphylococcus aureus and pseudomonas aeruginosa Filipiak, Wojciech; Sponring, Andreas; Baur, Maria BMC Microbiology, Vol. 12, Issue 1 https://doi.org/10.1186/1471-2180-12-113	journal	January 2012
ASAP7: A 7-nm finFET predictive process design kit Clark, Lawrence T.; Vashishtha, Vinay; Shifren, Lucian Microelectronics Journal, Vol. 53 https://doi.org/10.1016/j.mejo.2016.04.006	journal	July 2016
Variation in volatile organic compounds in the breath of normal humans Phillips, Michael; Herrera, Jolanta; Krishnan, Sunithi Journal of Chromatography B: Biomedical Sciences and Applications, Vol. 729, Issue 1-2 https://doi.org/10.1016/S0378-4347(99)00127-9	journal	June 1999
CMOS-based carbon nanotube pass-transistor logic integrated circuits Ding, Li; Zhang, Zhiyong; Liang, Shibo Nature Communications, Vol. 3, Issue 1 https://doi.org/10.1038/ncomms1682	journal	January 2012
Scalable and fully self-aligned n-type carbon nanotube transistors with gate-all-around Franklin, Aaron D.; Koswatta, Siyuranga O.; Farmer, Damon 2012 International Electron Devices Meeting https://doi.org/10.1109/IEDM.2012.6478979	conference	December 2012
High-Performance Air-Stable n-Type Carbon Nanotube Transistors with Erbium Contacts Shahrjerdi, Davood; Franklin, Aaron D.; Oida, Satoshi ACS Nano, Vol. 7, Issue 9 https://doi.org/10.1021/nn403935v	journal	September 2013
The Role of Metal−Nanotube Contact in the Performance of Carbon Nanotube Field-Effect Transistors Chen, Zhihong; Appenzeller, Joerg; Knoch, Joachim Nano Letters, Vol. 5, Issue 7, p. 1497-1502 https://doi.org/10.1021/nl0508624	journal	July 2005
Doping-Free Fabrication of Carbon Nanotube Based Ballistic CMOS Devices and Circuits Zhang, Zhiyong; Liang, Xuelei; Wang, Sheng Nano Letters, Vol. 7, Issue 12 https://doi.org/10.1021/nl0717107	journal	December 2007
Externally Assembled Gate-All-Around Carbon Nanotube Field-Effect Transistor Chen, Zhihong; Farmer, Damon; Xu, Sheng IEEE Electron Device Letters, Vol. 29, Issue 2 https://doi.org/10.1109/LED.2007.914069	journal	February 2008
VLSI-Compatible Carbon Nanotube Doping Technique with Low Work-Function Metal Oxides Suriyasena Liyanage, Luckshitha; Xu, Xiaoqing; Pitner, Greg Nano Letters, Vol. 14, Issue 4 https://doi.org/10.1021/nl404654j	journal	March 2014
Considerations for Ultimate CMOS Scaling Kuhn, K. J. IEEE Transactions on Electron Devices, Vol. 59, Issue 7 https://doi.org/10.1109/TED.2012.2193129	journal	July 2012
Rapid Co-Optimization of Processing and Circuit Design to Overcome Carbon Nanotube Variations Hills, Gage; Shulaker, Max Marcel IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, Vol. 34, Issue 7 https://doi.org/10.1109/TCAD.2015.2415492	journal	July 2015
Boolector 2.0 Niemetz, Aina; Preiner, Mathias; Biere, Armin Journal on Satisfiability, Boolean Modeling and Computation, Vol. 9, Issue 1 https://doi.org/10.3233/SAT190101	journal	June 2015
Scalable Preparation of High-Density Semiconducting Carbon Nanotube Arrays for High-Performance Field-Effect Transistors Si, Jia; Zhong, Donglai; Xu, Haitao ACS Nano, Vol. 12, Issue 1 https://doi.org/10.1021/acsnano.7b07665	journal	January 2018
Wafer-Scale Growth and Transfer of Aligned Single-Walled Carbon Nanotubes Patil, N.; Lin, A.; Myers, E. R. IEEE Transactions on Nanotechnology, Vol. 8, Issue 4, p. 498-504 https://doi.org/10.1109/TNANO.2009.2016562	journal	July 2009
Carbon Nanotubes as Schottky Barrier Transistors Heinze, S.; Tersoff, J.; Martel, R. Physical Review Letters, Vol. 89, Issue 10 https://doi.org/10.1103/PhysRevLett.89.106801	journal	August 2002
Parameter Space of Atomic Layer Deposition of Ultrathin Oxides on Graphene Aria, Adrianus I.; Nakanishi, Kenichi; Xiao, Long ACS Applied Materials & Interfaces, Vol. 8, Issue 44 https://doi.org/10.1021/acsami.6b09596	journal	October 2016
Controlled n-Type Doping of Carbon Nanotube Transistors by an Organorhodium Dimer Geier, Michael L.; Moudgil, Karttikay; Barlow, Stephen Nano Letters, Vol. 16, Issue 7 https://doi.org/10.1021/acs.nanolett.6b01393	journal	June 2016
Y-Contacted High-Performance n-Type Single-Walled Carbon Nanotube Field-Effect Transistors: Scaling and Comparison with Sc-Contacted Devices Ding, Li; Wang, Sheng; Zhang, Zhiyong Nano Letters, Vol. 9, Issue 12 https://doi.org/10.1021/nl9024243	journal	November 2009
Analysis of volatile organic compounds in exhaled breath to diagnose ventilator-associated pneumonia Schnabel, Ronny; Fijten, Rianne; Smolinska, Agnieszka Scientific Reports, Vol. 5, Issue 1 https://doi.org/10.1038/srep17179	journal	November 2015
Zipping, entanglement, and the elastic modulus of aligned single-walled carbon nanotube films Won, Yoonjin; Gao, Yuan; Panzer, Matthew A. Proceedings of the National Academy of Sciences, Vol. 110, Issue 51 https://doi.org/10.1073/pnas.1312253110	journal	December 2013
Electronic nose analysis of exhaled breath to diagnose ventilator-associated pneumonia Schnabel, R. M.; Boumans, M. L. L.; Smolinska, A. Respiratory Medicine, Vol. 109, Issue 11 https://doi.org/10.1016/j.rmed.2015.09.014	journal	November 2015
High-Performance Complementary Transistors and Medium-Scale Integrated Circuits Based on Carbon Nanotube Thin Films Yang, Yingjun; Ding, Li; Han, Jie ACS Nano, Vol. 11, Issue 4 https://doi.org/10.1021/acsnano.7b00861	journal	March 2017
Facile method for enhancing conductivity of printed carbon nanotubes electrode via simple rinsing process Li, Xinlin; Kim, Keon-Woo; Joo, Sang Woo Organic Electronics, Vol. 47 https://doi.org/10.1016/j.orgel.2017.05.020	journal	August 2017
VMR: VLSI-compatible metallic carbon nanotube removal for imperfection-immune cascaded multi-stage digital logic circuits using Carbon Nanotube FETs Patil, Nishant; Lin, Albert; Zhang, Jie 2009 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2009.5424295	conference	December 2009
National Trends in Patient Safety for Four Common Conditions, 2005–2011 Wang, Yun; Eldridge, Noel; Metersky, Mark L. New England Journal of Medicine, Vol. 370, Issue 4 https://doi.org/10.1056/NEJMsa1300991	journal	January 2014
Ballistic carbon nanotube field-effect transistors Javey, Ali; Guo, Jing; Wang, Qian Nature, Vol. 424, Issue 6949, p. 654-657 https://doi.org/10.1038/nature01797	journal	August 2003
Atomic layer deposited Al2O3 for gate dielectric and passivation layer of single-walled carbon nanotube transistors Kim, S. K.; Xuan, Y.; Ye, P. D. Applied Physics Letters, Vol. 90, Issue 16 https://doi.org/10.1063/1.2724904	journal	April 2007
MoS ₂ Field-Effect Transistor with Sub-10 nm Channel Length Nourbakhsh, Amirhasan; Zubair, Ahmad; Sajjad, Redwan N. Nano Letters, Vol. 16, Issue 12 https://doi.org/10.1021/acs.nanolett.6b03999	journal	November 2016
The N3XT Approach to Energy-Efficient Abundant-Data Computing Sabry Aly, Mohamed M.; Wu, Tony F.; Bartolo, Andrew Proceedings of the IEEE, Vol. 107, Issue 1 https://doi.org/10.1109/JPROC.2018.2882603	journal	January 2019
Cost-effectiveness of linezolid versus vancomycin in mechanical ventilation-associated nosocomial pneumonia caused by methicillin-resistant staphylococcus aureus Machado, Adão R. L.; Arns, Clovis da Cunha; Follador, Wilson Brazilian Journal of Infectious Diseases, Vol. 9, Issue 3 https://doi.org/10.1590/S1413-86702005000300001	journal	June 2005
Volatile Metabolites of Pathogens: A Systematic Review Bos, Lieuwe D. J.; Sterk, Peter J.; Schultz, Marcus J. PLoS Pathogens, Vol. 9, Issue 5 https://doi.org/10.1371/journal.ppat.1003311	journal	May 2013
Sensor-to-Digital Interface Built Entirely With Carbon Nanotube FETs Shulaker, Max M.; Van Rethy, Jelle; Hills, Gage IEEE Journal of Solid-State Circuits, Vol. 49, Issue 1 https://doi.org/10.1109/JSSC.2013.2282092	journal	January 2014
Monolithic 3D integration of logic and memory: Carbon nanotube FETs, resistive RAM, and silicon FETs Shulaker, Max M.; Wu, Tony F.; Pal, Asish 2014 IEEE International Electron Devices Meeting https://doi.org/10.1109/IEDM.2014.7047120	conference	December 2014
Tunable n -Type Doping of Carbon Nanotubes through Engineered Atomic Layer Deposition HfO _X Films Lau, Christian; Srimani, Tathagata; Bishop, Mindy D. ACS Nano, Vol. 12, Issue 11 https://doi.org/10.1021/acsnano.8b04208	journal	October 2018
Theoretical and experimental investigation of vacancy-based doping of monolayer MoS ₂ on oxide Valsaraj, Amithraj; Chang, Jiwon; Rai, Amritesh 2D Materials, Vol. 2, Issue 4 https://doi.org/10.1088/2053-1583/2/4/045009	journal	November 2015
Surveillance for lower airway pathogens in mechanically ventilated patients by metabolomic analysis of exhaled breath: a case-control study Fowler, S. J.; Basanta-Sanchez, M.; Xu, Y. Thorax, Vol. 70, Issue 4 https://doi.org/10.1136/thoraxjnl-2014-206273	journal	February 2015
Advances, challenges and opportunities in 3D CMOS sequential integration Batude, P.; Vinet, M.; Previtali, B. 2011 International Electron Devices Meeting https://doi.org/10.1109/IEDM.2011.6131506	conference	December 2011
Attributable mortality of ventilator-associated pneumonia – Authors' reply Melsen, Wilhelmina G.; Rovers, Maroeska M.; Bonten, Marc JM The Lancet Infectious Diseases, Vol. 13, Issue 12 https://doi.org/10.1016/S1473-3099(13)70326-8	journal	December 2013
A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance Hahn, H.; Deshpande, V.; Caruso, E. 2017 IEEE International Electron Devices Meeting (IEDM) https://doi.org/10.1109/IEDM.2017.8268410	conference	December 2017
Identification of microorganisms based on headspace analysis of volatile organic compounds by gas chromatography–mass spectrometry Boots, A. W.; Smolinska, A.; van Berkel, J. J. B. N. Journal of Breath Research, Vol. 8, Issue 2 https://doi.org/10.1088/1752-7155/8/2/027106	journal	April 2014
50 Years of computer architecture: From the mainframe CPU to the domain-specific tpu and the open RISC-V instruction set Patterson, David 2018 IEEE International Solid - State Circuits Conference - (ISSCC) https://doi.org/10.1109/ISSCC.2018.8310168	conference	February 2018
Carbon Nanotube Circuits: Opportunities and Challenges Wei, Hai; Shulaker, Max; Hills, Gage Design, Automation & Test in Europe Conference & Exhibition (DATE), 2013 https://doi.org/10.7873/DATE.2013.136	conference	January 2013
Energy-Efficient Abundant-Data Computing: The N3XT 1,000x Sabry Aly, Mohamed M.; Gao, Mingyu; Hills, Gage Computer, Vol. 48, Issue 12 https://doi.org/10.1109/MC.2015.376	journal	December 2015
Monolithic 3D integration advances and challenges: From technology to system levels Ebrahimi, Mohammad Sadegh; Hills, Gage; Sabry, Mohamed M. 2014 SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S) https://doi.org/10.1109/S3S.2014.7028198	conference	October 2014
Carbon nanotube computer Shulaker, Max M.; Hills, Gage; Patil, Nishant Nature, Vol. 501, Issue 7468 https://doi.org/10.1038/nature12502	journal	September 2013
Flexible CMOS integrated circuits based on carbon nanotubes with sub-10 ns stage delays Tang, Jianshi; Cao, Qing; Tulevski, George Nature Electronics, Vol. 1, Issue 3 https://doi.org/10.1038/s41928-018-0038-8	journal	March 2018
Ventilator associated pneumonia: perspectives on the burden of illness Cook, D. Intensive Care Medicine, Vol. 26, Issue S1 https://doi.org/10.1007/s001340051116	journal	February 2000
Dose-Controlled, Floating Evaporative Self-assembly and Alignment of Semiconducting Carbon Nanotubes from Organic Solvents Joo, Yongho; Brady, Gerald J.; Arnold, Michael S. Langmuir, Vol. 30, Issue 12 https://doi.org/10.1021/la500162x	journal	March 2014
Economic Impact of Ventilator-Associated Pneumonia in a Large Matched Cohort Kollef, Marin H.; Hamilton, Cindy W.; Ernst, Frank R. Infection Control & Hospital Epidemiology, Vol. 33, Issue 3 https://doi.org/10.1086/664049	journal	March 2012
TRIG: hardware accelerator for inference-based applications and experimental demonstration using carbon nanotube FETs Hills, Gage; Shulaker, Max M.; Wong, H. -S. Philip Proceedings of the 55th Annual Design Automation Conference on - DAC '18 https://doi.org/10.1145/3195970.3196132	conference	January 2018
Progress and Challenges in VLSI Placement Research Markov, Igor L.; Hu, Jin; Kim, Myung-Chul Proceedings of the IEEE, Vol. 103, Issue 11 https://doi.org/10.1109/JPROC.2015.2478963	journal	November 2015
Scaling carbon nanotube complementary transistors to 5-nm gate lengths Qiu, Chenguang; Zhang, Zhiyong; Xiao, Mengmeng Science, Vol. 355, Issue 6322 https://doi.org/10.1126/science.aaj1628	journal	January 2017
Carbon nanotube transistors scaled to a 40-nanometer footprint Cao, Qing; Tersoff, Jerry; Farmer, Damon B. Science, Vol. 356, Issue 6345 https://doi.org/10.1126/science.aan2476	journal	June 2017
Efficient and Reversible Electron Doping of Semiconductor-Enriched Single-Walled Carbon Nanotubes by Using Decamethylcobaltocene Xu, Jian-Long; Dai, Rui-Xuan; Xin, Yan Scientific Reports, Vol. 7, Issue 1 https://doi.org/10.1038/s41598-017-05967-w	journal	July 2017
Experimental demonstration of a fully digital capacitive sensor interface built entirely using carbon-nanotube FETs Shulaker, Max; Van Rethy, Jelle; Hills, Gage 2013 IEEE International Solid-State Circuits Conference Digest of Technical Papers https://doi.org/10.1109/ISSCC.2013.6487660	conference	February 2013
Selective Etching of Metallic Carbon Nanotubes by Gas-Phase Reaction Zhang, G.; Qi, P.; Wang, X. Science, Vol. 314, Issue 5801 https://doi.org/10.1126/science.1133781	journal	November 2006
Air-Stable Conversion of Separated Carbon Nanotube Thin-Film Transistors from p-Type to n-Type Using Atomic Layer Deposition of High-κ Oxide and Its Application in CMOS Logic Circuits Zhang, Jialu; Wang, Chuan; Fu, Yue ACS Nano, Vol. 5, Issue 4 https://doi.org/10.1021/nn2004298	journal	March 2011
Carbon nanotube-based three-dimensional monolithic optoelectronic integrated system Liu, Yang; Wang, Sheng; Liu, Huaping Nature Communications, Vol. 8, Issue 1 https://doi.org/10.1038/ncomms15649	journal	June 2017
Atomic Layer Deposition on Suspended Single-Walled Carbon Nanotubes via Gas-Phase Noncovalent Functionalization Farmer, Damon B.; Gordon, Roy G. Nano Letters, Vol. 6, Issue 4 https://doi.org/10.1021/nl052453d	journal	April 2006
Quasi-ballistic carbon nanotube array transistors with current density exceeding Si and GaAs Brady, Gerald J.; Way, Austin J.; Safron, Nathaniel S. Science Advances, Vol. 2, Issue 9 https://doi.org/10.1126/sciadv.1601240	journal	September 2016
Brain-inspired computing exploiting carbon nanotube FETs and resistive RAM: Hyperdimensional computing case study Wu, Tony F.; Li, Haitong; Huang, Ping-Chen 2018 IEEE International Solid - State Circuits Conference - (ISSCC) https://doi.org/10.1109/ISSCC.2018.8310399	conference	February 2018
High Purity Isolation and Quantification of Semiconducting Carbon Nanotubes via Column Chromatography Tulevski, George S.; Franklin, Aaron D.; Afzali, Ali ACS Nano, Vol. 7, Issue 4 https://doi.org/10.1021/nn400053k	journal	March 2013

Similar Records

High-performance carbon-nanotube-based complementary field-effect-transistors and integrated circuits with yttrium oxide

Journal Article · Mon Aug 11 00:00:00 EDT 2014 · Applied Physics Letters · OSTI ID:22318010

A radiation-hardened 10K-gate CMOS gate array

Conference · Thu Nov 30 23:00:00 EST 1989 · IEEE Transactions on Nuclear Science (Institute of Electrical and Electronics Engineers); (USA) · OSTI ID:6948248

High-gain monolithic 3D CMOS inverter using layered semiconductors

Journal Article · Sun Nov 26 23:00:00 EST 2017 · Applied Physics Letters · OSTI ID:1642668

Tunable doping of carbon nanotubes through engineered atomic layer deposition

Citation Formats

References (113)

Similar Records

Related Subjects