A CVD Diamond-Based Photodetector for the Visible and Near-IR Spectral Range
Journal Article
·
· Technical Physics Letters
- Federal Research Center, Institute of Applied Physics, Russian Academy of Sciences (Russian Federation)
- Lobachevsky State University of Nizhny Novgorod, Physical-Technical Research Institute (Russian Federation)
A photodetector for the visible and near-IR spectral range has been created on the basis of a chemical- vapor-deposited diamond modulation-doped with boron. The detected electromagnetic radiation is absorbed in a thin Cr (7 nm)–Au (5.5 nm) bimetallic sublayer deposited on the surface of a modulationdoped diamond film comprising a highly doped (up to 5 × 10{sup 19} cm{sup –3}) 3-nm-thick delta-layer, low-doped (~10{sup 17} cm{sup –3}) 800-nm-thick sublayer, and highly doped (10{sup 20} cm{sup –3}) ~10-μm-thick sublayer with an ohmic Ti(50 nm)/Pt(15 nm)/Au(30 nm) contact. Holes generated in the bimetallic sublayer diffuse into diamond and are accelerated by an electric field in the low-doped sublayer to form a response photocurrent. The ampere/watt responsivity of the photodetector reaches 1 μA/W at a radiation wavelength of 445 nm and 0.18 μA/W at 1.06 μm.
- OSTI ID:
- 22783989
- Journal Information:
- Technical Physics Letters, Journal Name: Technical Physics Letters Journal Issue: 12 Vol. 43; ISSN 1063-7850
- Country of Publication:
- United States
- Language:
- English
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