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Resistive memory switching in ultrathin TiO{sub 2} films grown by atomic layer deposition

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4948104· OSTI ID:22608831
; ; ; ;  [1]
  1. Laser Material Processing Division, Raja Ramanna Centre for Advanced Technology, Indore 452013 (India)

Electric field controlled forming free and unipolar resistive memory switching was observed in Au/TiO{sub 2}/Pt devices containing ultrathin TiO{sub 2} films of thickness ~ 4 nm grown by atomic layer deposition. These devices showed a large resistance ratio of ~ 10{sup 3} between high and low resistance states along with appreciable time retention for ~ 10{sup 4} seconds and endurance. The spread of reset and set voltages was from ~ 0.4-0.6 V and 1.1-1.5 V respectively with a clear window between them. The resistive switching mechanism was explained based on conductive filamentary model.

OSTI ID:
22608831
Journal Information:
AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1731; ISSN 0094-243X; ISSN APCPCS
Country of Publication:
United States
Language:
English

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