X-ray fluorescence analysis of Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glasses using electronic excitation

Journal Article · Thu Oct 15 00:00:00 EDT 2015 · Semiconductors

DOI:https://doi.org/10.1134/S1063782615100255· OSTI ID:22469718

Terukov, E. I. ^[1]; Marchenko, A. V. ^[2]; Zhilina, D. V. ^[1]; Bobokhuzhaev, K. U. ^[3]

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1. Russian Academy of Sciences, Ioffe Physical–Technical Institute (Russian Federation)
2. Alexander Herzen State Pedagogical University of Russia (Russian Federation)
3. Mirzo Ulug’bek National University of Uzbekistan (Uzbekistan)

X-ray fluorescence analysis with fluorescence excitation by an electron beam with an energy of 30 kV is applied to determine the germanium, arsenic, and selenium contents in Ge{sub 1–x}Se{sub x}, As{sub 1–x}Se{sub x}, and Ge{sub 1–x–y}As{sub y}Se{sub x} glassy alloys. Using calibration dependences, the quantitative composition of the glasses is determined with an accuracy of ±0.0002 for parameters x and y in a surface layer ∼0.1 µm deep.

• OSTI ID: 22469718
• Journal Information: Semiconductors, Vol. 49, Issue 10; Other Information: Copyright (c) 2015 Pleiades Publishing, Ltd.; Country of input: International Atomic Energy Agency (IAEA); ISSN 1063-7826
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
CALIBRATION
CONCENTRATION RATIO
ELECTRON BEAMS
EXCITATION
FLUORESCENCE
GERMANIUM ARSENIDES
GERMANIUM SELENIDES
GLASS
LAYERS
METALLIC GLASSES
SURFACES
X-RAY FLUORESCENCE ANALYSIS