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Title: Determination of effective mechanical properties of a double-layer beam by means of a nano-electromechanical transducer

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4896785· OSTI ID:22350813
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  1. Walther-Meißner-Institut, Bayerische Akademie der Wissenschaften, D-85748 Garching (Germany)
  2. École Polytechnique Fédérale de Lausanne, CH-1015 Lausanne (Switzerland)

We investigate the mechanical properties of a doubly clamped, double-layer nanobeam embedded into an electromechanical system. The nanobeam consists of a highly pre-stressed silicon nitride and a superconducting niobium layer. By measuring the mechanical displacement spectral density both in the linear and the nonlinear Duffing regime, we determine the pre-stress and the effective Young's modulus of the nanobeam. An analytical double-layer model quantitatively corroborates the measured values. This suggests that this model can be used to design mechanical multilayer systems for electro- and optomechanical devices, including materials controllable by external parameters such as piezoelectric, magnetostrictive, or in more general multiferroic materials.

OSTI ID:
22350813
Journal Information:
Applied Physics Letters, Vol. 105, Issue 13; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English