Effect of substrate temperature on the microstructural properties of titanium nitride nanowires grown by pulsed laser deposition
Journal Article
·
· Journal of Applied Physics
- Department of Mechanical Engineering, North Carolina A and T State University, 1601 East Market St., Greensboro, North Carolina 27411 (United States)
- Department of Materials Science and Engineering, North Carolina State University, 911 Partners Way, EB1, Raleigh, North Carolina 27695 (United States)
The current work reports on the growth and microstructural characterization of titanium nitride (TiN) nanowires on single crystal silicon substrates using a pulsed laser deposition method. The physical and microstructural properties of the nanowires were characterized using field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). The corrosion properties of the TiN nanowires compared to TiN thin film were evaluated using Direct Current potentiodynamic and electrochemical impedance spectroscopy. The nanowires corroded faster than the TiN thin film, because the nanowires have a larger surface area which makes them more reactive in a corrosive environment. It was observed from the FESEM image analyses that as the substrate temperature increases from 600 °C to 800 °C, there was an increase in both diameter (25 nm–50 nm) and length (150 nm–250 nm) of the nanowire growth. There was also an increase in spatial density with an increase of substrate temperature. The TEM results showed that the TiN nanowires grow epitaxially with the silicon substrate via domain matching epitaxy paradigm, despite a large misfit.
- OSTI ID:
- 22314621
- Journal Information:
- Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 6 Vol. 116; ISSN JAPIAU; ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DIRECT CURRENT
ENERGY BEAM DEPOSITION
EPITAXY
LASER RADIATION
MICROSTRUCTURE
MONOCRYSTALS
PULSED IRRADIATION
QUANTUM WIRES
SCANNING ELECTRON MICROSCOPY
SPECTROSCOPY
SUBSTRATES
THIN FILMS
TITANIUM NITRIDES
TRANSMISSION ELECTRON MICROSCOPY
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
DIRECT CURRENT
ENERGY BEAM DEPOSITION
EPITAXY
LASER RADIATION
MICROSTRUCTURE
MONOCRYSTALS
PULSED IRRADIATION
QUANTUM WIRES
SCANNING ELECTRON MICROSCOPY
SPECTROSCOPY
SUBSTRATES
THIN FILMS
TITANIUM NITRIDES
TRANSMISSION ELECTRON MICROSCOPY