Metal-like self-organization of periodic nanostructures on silicon and silicon carbide under femtosecond laser pulses

Journal Article · Thu Nov 21 00:00:00 EST 2013 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4832829· OSTI ID:22258757

Gemini, Laura ^[1]; Hashida, Masaki; Shimizu, Masahiro; Miyasaka, Yasuhiro; Inoue, Shunsuke; Tokita, Shigeki; Sakabe, Shuji ^[1]; Limpouch, Jiri ^[2]; Mocek, Tomas ^[3]

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1. Advanced Research Center for beam Science, Institute for Chemical Research, Kyoto University, 611-0011 Kyoto (Japan)
2. FNSPE, Czech Technical University in Prague, 11519 Prague (Czech Republic)
3. HiLASE Project, Institute of Physics, ASCR, 18221 Prague (Czech Republic)

Periodic structures were generated on Si and SiC surfaces by irradiation with femtosecond laser pulses. Self-organized structures with spatial periodicity of approximately 600 nm appear on silicon and silicon carbide in the laser fluence range just above the ablation threshold and upon irradiation with a large number of pulses. As in the case of metals, the dependence of the spatial periodicity on laser fluence can be explained by the parametric decay of laser light into surface plasma waves. The results show that the proposed model might be universally applicable to any solid state material.

• OSTI ID: 22258757
• Journal Information: Journal of Applied Physics, Vol. 114, Issue 19; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
ABLATION
DECAY
IRRADIATION
LASERS
METALS
NANOSTRUCTURES
PERIODICITY
PLASMA WAVES
SILICON
SILICON CARBIDES