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MEMS-tunable optical ring resonator

Patent ·
OSTI ID:2222097

A microelectromechanical systems (MEMS)-tunable optical ring resonator is described herein. The ring resonator includes a resonator ring and a tuner ring, along with one or more springs. The springs may be internal or external, i.e., either within or outside the areal footprint of the resonator ring and the tuner ring. The one or more springs are configured to displace the tuner ring from the resonator ring by a desired gap based upon a desired resonant wavelength of the resonator ring. Tuning is implemented by applying a voltage to the ring resonator, with motion of the tuner ring causing a corresponding change in the effective index of the resonator ring. As the ring resonator is essentially a capacitive device, it draws very little power once tuning is achieved.

Research Organization:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Organization:
USDOE National Nuclear Security Administration (NNSA)
DOE Contract Number:
NA0003525
Assignee:
National Technology & Engineering Solutions of Sandia, LLC (Albuquerque, NM)
Patent Number(s):
11,722,120
Application Number:
17/391,126
OSTI ID:
2222097
Country of Publication:
United States
Language:
English

References (8)

Nano–opto-electro-mechanical switches operated at CMOS-level voltages journal November 2019
Waveform optimization for resonantly driven MEMS switches electrostatically biased near pull-in conference January 2018
Low-Voltage, Large-Scan Angle MEMS Analog Micromirror Arrays With Hidden Vertical Comb-Drive Actuators journal April 2004
RF MEMS Switches With $\hbox{RuO}_{2}$ –$\hbox{Au}$ Contacts Cycled to 10 Billion Cycles journal June 2013
A 25 Gb/s, 4.4 V-Swing, AC-Coupled Ring Modulator-Based WDM Transmitter with Wavelength Stabilization in 65 nm CMOS journal December 2015
Integrated wavelength-selective optical MEMS switching using ring resonator filters journal June 2005
Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever journal August 2011
Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators journal August 2006

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