Tunable cavity resonator including a plurality of MEMS beams

Peroulis, Dimitrios; Fruehling, Adam; Small, Joshua Azariah; Liu, Xiaoguang; Irshad, Wasim; Arif, Muhammad Shoaib

Tunable cavity resonator including a plurality of MEMS beams

Patent · 20 October 2015

OSTI ID:1223688

Peroulis, Dimitrios; Fruehling, Adam; Small, Joshua Azariah; Liu, Xiaoguang; Irshad, Wasim; Arif, Muhammad Shoaib

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

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Research Organization:: Purdue Research Foundation, West Lafayette, IN (United States)

Sponsoring Organization:: USDOE

DOE Contract Number:: FC52-08NA28617

Assignee:: Purdue Research Foundation (West Lafayette, IN)

Patent Number(s):: 9,166,271

Application Number:: 13/908,201

OSTI ID:: 1223688

Country of Publication:: United States

Language:: English

References (22)

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