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Title: Tunable cavity resonator including a plurality of MEMS beams

Abstract

A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.

Inventors:
; ; ; ; ;
Publication Date:
Research Org.:
Purdue Research Foundation, West Lafayette, IN (United States)
Sponsoring Org.:
USDOE
OSTI Identifier:
1223688
Patent Number(s):
9,166,271
Application Number:
13/908,201
Assignee:
Purdue Research Foundation (West Lafayette, IN)
DOE Contract Number:  
FC52-08NA28617
Resource Type:
Patent
Resource Relation:
Patent File Date: 2013 Jun 03
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS

Citation Formats

Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, and Arif, Muhammad Shoaib. Tunable cavity resonator including a plurality of MEMS beams. United States: N. p., 2015. Web.
Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, & Arif, Muhammad Shoaib. Tunable cavity resonator including a plurality of MEMS beams. United States.
Peroulis, Dimitrios, Fruehling, Adam, Small, Joshua Azariah, Liu, Xiaoguang, Irshad, Wasim, and Arif, Muhammad Shoaib. Tue . "Tunable cavity resonator including a plurality of MEMS beams". United States. https://www.osti.gov/servlets/purl/1223688.
@article{osti_1223688,
title = {Tunable cavity resonator including a plurality of MEMS beams},
author = {Peroulis, Dimitrios and Fruehling, Adam and Small, Joshua Azariah and Liu, Xiaoguang and Irshad, Wasim and Arif, Muhammad Shoaib},
abstractNote = {A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator.},
doi = {},
journal = {},
number = ,
volume = ,
place = {United States},
year = {2015},
month = {10}
}

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