KrF- and ArF-excimer-laser-induced absorption in silica glasses produced by melting synthetic silica powder

Journal Article · Sun Jul 07 04:00:00 EDT 2013 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4811461· OSTI ID:22122786

Kuzuu, Nobu; Sasaki, Toshiya; Kojima, Tatsuya ^[1]; Tanaka, Jun-ichiro; Nakamura, Takayuki; Horikoshi, Hideharu ^[2]

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1. Department of Applied Physics, University of Fukui, 3-9-1 Bunkyo, Fukui-shi, Fukui 910-8507 (Japan)
2. Tosoh SGM Corp., 4555 Kaisei-cho, Shunan-shi, Yamaguchi 746-0006 (Japan)

KrF- and ArF-excimer-laser-induced absorption of silica glasses produced by electric melting and flame fusion of synthetic silica powder were investigated. The growth of KrF-laser-induced absorption was more gradual than that of ArF-laser-induced absorption. Induced absorption spectra exhibited a peak at about 5.8 eV, of which the position and width differed slightly among samples and laser species. Widths of ArF-laser-induced absorption spectra were wider than those of KrF-laser-induced spectra. KrF-laser-induced absorption is reproducible by two Gaussian absorption bands peaking at 5.80 eV with full width at half maximum (FWHM) of 0.62 eV and at 6.50 eV with FWHM of 0.74 eV. For reproduction of ArF-laser-induced absorption, Gaussian bands at 5.41 eV with FWHM of 0.62 eV was necessary in addition to components used for reproducing KrF-laser-induced absorption. Based on the discussion of the change of defect structures evaluated from change of absorption components, we proposed that the precursor of the 5.8-eV band ascribed to E Prime center ({identical_to}Si{center_dot}) is {identical_to}Si-H HO-Si{identical_to} structures formed by the reaction between strained Si-O-Si bonds and interstitial H{sub 2} molecules during the irradiation.

• OSTI ID: 22122786
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 1 Vol. 114; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION
ABSORPTION SPECTRA
ARGON FLUORIDES
CRYSTAL DEFECTS
EV RANGE
GLASS
INFRARED SPECTRA
INTERSTITIALS
IRRADIATION
KRYPTON FLUORIDE LASERS
LASER RADIATION
MELTING
MOLECULES
POWDERS
RAMAN SPECTRA
REPRODUCTION
SILICA
SILICON COMPOUNDS
ULTRAVIOLET SPECTRA
VISIBLE SPECTRA