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U.S. Department of Energy
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Uv-preionized ArF and KrF excimer lasers

Technical Report ·
OSTI ID:6569741

Experimental investigations of UV-preionized ArF and KrF excimer lasers are reported. The output laser energies of 105 mJ for ArF and 185 mJ for KrF are obtained. Effects of various parameters on the laser characteristics are discussed.

Research Organization:
Air Force Systems Command, Wright-Patterson AFB, Ohio
OSTI ID:
6569741
Report Number(s):
N-82-19537
Country of Publication:
United States
Language:
English

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