Uv-preionized ArF and KrF excimer lasers
Technical Report
·
OSTI ID:6569741
Experimental investigations of UV-preionized ArF and KrF excimer lasers are reported. The output laser energies of 105 mJ for ArF and 185 mJ for KrF are obtained. Effects of various parameters on the laser characteristics are discussed.
- Research Organization:
- Air Force Systems Command, Wright-Patterson AFB, Ohio
- OSTI ID:
- 6569741
- Report Number(s):
- N-82-19537
- Country of Publication:
- United States
- Language:
- English
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