UV-preionized KrF excimer laser with an output energy of 0. 42 J
Journal Article
·
· Chin. Phys.; (United States)
OSTI ID:6575007
Experimental studies on the high power and high efficiency UV-preionized KrF (lambda = 248 nm) excimer laser are reported. The maximum output energy per pulse is over 420 mJ. Characteristics of lasing and fluorescence spectrum for KrF are studied. The effect of additive Ne gas in the mixture on lasing energy is examined.
- Research Organization:
- Shanghai Institute of Optics and Fine Mechanics, Academia Sinica
- OSTI ID:
- 6575007
- Journal Information:
- Chin. Phys.; (United States), Journal Name: Chin. Phys.; (United States) Vol. 2:4; ISSN CHPHD
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
42 ENGINEERING
420300* -- Engineering-- Lasers-- (-1989)
EFFICIENCY
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY YIELD
FLUIDS
FLUORESCENCE
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LUMINESCENCE
NEON
NONMETALS
PERFORMANCE
POWER
RADIATIONS
RARE GAS COMPOUNDS
RARE GASES
ULTRAVIOLET RADIATION
YIELDS
420300* -- Engineering-- Lasers-- (-1989)
EFFICIENCY
ELECTROMAGNETIC RADIATION
ELEMENTS
ENERGY YIELD
FLUIDS
FLUORESCENCE
FLUORIDES
FLUORINE COMPOUNDS
GAS LASERS
GASES
HALIDES
HALOGEN COMPOUNDS
KRYPTON COMPOUNDS
KRYPTON FLUORIDES
LASERS
LUMINESCENCE
NEON
NONMETALS
PERFORMANCE
POWER
RADIATIONS
RARE GAS COMPOUNDS
RARE GASES
ULTRAVIOLET RADIATION
YIELDS