Magnetic properties of Fe{sub 7}Co{sub 3} films with gas cluster ion beam irradiations

Journal Article · Tue May 07 04:00:00 EDT 2013 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4797475· OSTI ID:22102389

Toyoda, Noriaki; Fujimoto, Akihiro; Yamada, Isao ^[1]

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1. Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2280 (Japan)

Gas cluster ion beam (GCIB) irradiation was performed on Fe{sub 7}Co{sub 3} films to examine the magnetic properties. After Ar ion beam etching, the coercive force (H{sub c}) increased from the initial value; this may have been caused by irradiation damage from high-energy Ar ions. H{sub c} decreased after Ar-GCIB irradiation (acceleration voltage (V{sub a}): 20 kV, ion fluence (F): 1 Multiplication-Sign 10{sup 15} ions/cm{sup 2}). Since GCIB is an equivalent low-energy (several eV/atom) ion beam, it shows a damage-recovery effect. When the ionization electron voltage (V{sub e}) was reduced from 200 to 60 V, H{sub c} was observed to further decrease. Since the fraction of multiply charged Ar-GCIB decreased with decreasing V{sub e}, severe damage of Fe{sub 7}Co{sub 3} films can be minimized by employing low V{sub e}.

• OSTI ID: 22102389
• Journal Information: Journal of Applied Physics, Journal Name: Journal of Applied Physics Journal Issue: 17 Vol. 113; ISSN JAPIAU; ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ACCELERATION
ARGON IONS
ATOMS
COBALT ALLOYS
COERCIVE FORCE
ION BEAMS
ION PAIRS
IONIZATION
IRON ALLOYS
IRRADIATION
MAGNETIC PROPERTIES
SPUTTERING
THIN FILMS