Energy Loss And Beam Transport Properties of Gas Cluster Ion Beams

Journal Article · Tue Mar 10 04:00:00 EDT 2009 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3120018· OSTI ID:21289525

Toyoda, Noriaki; Yamada, Isao ^[1]

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1. Incubation center, Graduate school of engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo, 671-2280 (Japan)

Energy losses of a gas cluster ion beam (GCIB) after collisions with residual gases were studied for Ar and CO{sub 2} GCIBs. From the energy distribution of an Ar GCIB after collisions at various acceleration voltages and cluster sizes, it is found that GCIB lost its energy when its energy per atom was high. In addition, the energy loss of CO{sub 2} GCIB was moderate compared to that of Ar GCIB at the same cluster size because of strong binging energy of CO{sub 2} molecules. The energy loss mainly occurs as decrease of its cluster size. The number of the scattered atoms or molecules linearly increased with the energy per atom or molecule. The reduction of cluster size is determined by the energy/atom and the cohesive energy of the gas.

• OSTI ID: 21289525
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1099; ISSN APCPCS; ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
ARGON
ATOMS
BINDING ENERGY
CARBON DIOXIDE
ENERGY LOSSES
ENERGY SPECTRA
ION BEAMS
ION PAIRS
ION-ATOM COLLISIONS
ION-MOLECULE COLLISIONS
MOLECULES