X-ray photoelectron spectroscopy analysis of organic materials irradiated with gas cluster ion beam

Journal Article · Fri Jan 07 04:00:00 EST 2011 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.3548401· OSTI ID:21510109

Nakagiri, Motohiro; Toyoda, Noriaki; Yamada, Isao ^[1]

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1. Incubation center, Graduate school of engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo, 671-2280 (Japan)

Irradiation effect of gas cluster ion beams (GCIB) on organic materials were studied with X-ray photoelectron spectroscopy by comparison to that with Ar-monomer ions. In the case of polyimide, the intensity of both N-C = O and -C-O- bond decreased with 500 eV Ar monomer ion irradiation. On the other hand, there was no significant change in the XPS spectra after Ar-GCIB irradiation. From the size-selected GCIB irradiation study, the damages in polyimide decreased with increasing the cluster size owing to the reduction of energy per atoms.

• OSTI ID: 21510109
• Journal Information: AIP Conference Proceedings, Journal Name: AIP Conference Proceedings Journal Issue: 1 Vol. 1321; ISSN 0094-243X; ISSN APCPCS
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ARGON
ATOMIC FORCE MICROSCOPY
ATOMS
BEAMS
CHARGED PARTICLES
CLUSTER BEAMS
COMPARATIVE EVALUATIONS
ELECTRON SPECTROSCOPY
ELEMENTS
EVALUATION
FLUIDS
GASES
ION BEAMS
ION PAIRS
IONS
IRRADIATION
MATTER
MICROSCOPY
MONOMERS
NONMETALS
ORGANIC COMPOUNDS
ORGANIC MATTER
PHOTOELECTRON SPECTROSCOPY
RARE GASES
SPECTRA
SPECTROSCOPY
X-RAY PHOTOELECTRON SPECTROSCOPY