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Title: Phase constitution and interface structure of nano-sized Ag-Cu/AlN multilayers: Experiment and ab initio modeling

Abstract

Nano-sized Ag-Cu{sub 8nm}/AlN{sub 10nm} multilayers were deposited by reactive DC sputtering on {alpha}-Al{sub 2}O{sub 3}(0001) substrates. Investigation of the phase constitution and interface structure of the multilayers evidences a phase separation of the alloy sublayers into nanosized grains of Ag and Cu. The interfaces between the Ag grains and the quasi-single-crystalline AlN sublayers are semi-coherent, whereas the corresponding Cu/AlN interfaces are incoherent. The orientation relationship between Ag and AlN is constant throughout the entire multilayer stack. These observations are consistent with atomistic models of the interfaces as obtained by ab initio calculations.

Authors:
; ; ; ; ;  [1];  [1];  [2];  [1];  [3];  [4]
  1. Empa, Swiss Federal Laboratories for Materials Science and Technology, Ueberlandstrasse 129, CH-8600 Duebendorf (Switzerland)
  2. (Slovakia)
  3. (Poland)
  4. Kirsten Soldering AG, Hinterbergstrasse 32, CH-6330 Cham (Switzerland)
Publication Date:
OSTI Identifier:
22080511
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 101; Journal Issue: 18; Other Information: (c) 2012 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALLOYS; ALUMINIUM NITRIDES; ALUMINIUM OXIDES; COPPER; DEPOSITION; INTERFACES; LAYERS; MONOCRYSTALS; NANOSTRUCTURES; SILVER; SIMULATION; SPUTTERING; SUBSTRATES

Citation Formats

Pigozzi, Giancarlo, Janczak-Rusch, Jolanta, Passerone, Daniele, Antonio Pignedoli, Carlo, Patscheider, Joerg, Jeurgens, Lars P. H., Antusek, Andrej, Faculty of Materials Science and Technology, Slovak University of Technology in Bratislava, Paulinska 16, 917 24 Trnava, Parlinska-Wojtan, Magdalena, University of Rzeszow, Institute of Physics, ul. Rejtana 16a, 35-959 Rzeszow, and Bissig, Vinzenz. Phase constitution and interface structure of nano-sized Ag-Cu/AlN multilayers: Experiment and ab initio modeling. United States: N. p., 2012. Web. doi:10.1063/1.4761471.
Pigozzi, Giancarlo, Janczak-Rusch, Jolanta, Passerone, Daniele, Antonio Pignedoli, Carlo, Patscheider, Joerg, Jeurgens, Lars P. H., Antusek, Andrej, Faculty of Materials Science and Technology, Slovak University of Technology in Bratislava, Paulinska 16, 917 24 Trnava, Parlinska-Wojtan, Magdalena, University of Rzeszow, Institute of Physics, ul. Rejtana 16a, 35-959 Rzeszow, & Bissig, Vinzenz. Phase constitution and interface structure of nano-sized Ag-Cu/AlN multilayers: Experiment and ab initio modeling. United States. doi:10.1063/1.4761471.
Pigozzi, Giancarlo, Janczak-Rusch, Jolanta, Passerone, Daniele, Antonio Pignedoli, Carlo, Patscheider, Joerg, Jeurgens, Lars P. H., Antusek, Andrej, Faculty of Materials Science and Technology, Slovak University of Technology in Bratislava, Paulinska 16, 917 24 Trnava, Parlinska-Wojtan, Magdalena, University of Rzeszow, Institute of Physics, ul. Rejtana 16a, 35-959 Rzeszow, and Bissig, Vinzenz. Mon . "Phase constitution and interface structure of nano-sized Ag-Cu/AlN multilayers: Experiment and ab initio modeling". United States. doi:10.1063/1.4761471.
@article{osti_22080511,
title = {Phase constitution and interface structure of nano-sized Ag-Cu/AlN multilayers: Experiment and ab initio modeling},
author = {Pigozzi, Giancarlo and Janczak-Rusch, Jolanta and Passerone, Daniele and Antonio Pignedoli, Carlo and Patscheider, Joerg and Jeurgens, Lars P. H. and Antusek, Andrej and Faculty of Materials Science and Technology, Slovak University of Technology in Bratislava, Paulinska 16, 917 24 Trnava and Parlinska-Wojtan, Magdalena and University of Rzeszow, Institute of Physics, ul. Rejtana 16a, 35-959 Rzeszow and Bissig, Vinzenz},
abstractNote = {Nano-sized Ag-Cu{sub 8nm}/AlN{sub 10nm} multilayers were deposited by reactive DC sputtering on {alpha}-Al{sub 2}O{sub 3}(0001) substrates. Investigation of the phase constitution and interface structure of the multilayers evidences a phase separation of the alloy sublayers into nanosized grains of Ag and Cu. The interfaces between the Ag grains and the quasi-single-crystalline AlN sublayers are semi-coherent, whereas the corresponding Cu/AlN interfaces are incoherent. The orientation relationship between Ag and AlN is constant throughout the entire multilayer stack. These observations are consistent with atomistic models of the interfaces as obtained by ab initio calculations.},
doi = {10.1063/1.4761471},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 18,
volume = 101,
place = {United States},
year = {2012},
month = {10}
}