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Title: Ti{sub 2}AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers

Abstract

Highlights: • Epitaxial thin films of the MAX phase Ti{sub 2}AlN are obtained by thermal annealing. • A new metastable (Ti,Al,N) solid solution with the structure of α-T is evidenced. • The formation of the MAX phase occurs at low temperature (600 °C). - Abstract: Single-phase Ti{sub 2}AlN thin films were obtained by annealing in vacuum of (Ti + Al)/AlN multilayers deposited at room temperature by magnetron sputtering onto single-crystalline (0001) 4H-SiC and (0001) Al{sub 2}O{sub 3} substrates. In-situ X-ray diffraction experiments combined with ex-situ cross-sectional transmission electron microscopy observations reveal that interdiffusion processes occur in the multilayer at a temperature of ∼400 °C leading to the formation of a (Ti, Al, N) solid solution, having the hexagonal structure of α-Ti, whereas the formation of Ti{sub 2}AlN occurs at 550–600 °C. Highly oriented (0002) Ti{sub 2}AlN thin films can be obtained after an annealing at 750 °C.

Authors:
 [1]; ; ; ;  [1];  [1];  [2]
  1. Institut Pprime, UPR 3346, Université de Poitiers, SP2MI-Boulevard 3, Téléport 2-BP 30179, 86962 Futuroscope Chasseneuil Cedex (France)
  2. (Sweden)
Publication Date:
OSTI Identifier:
22581585
Resource Type:
Journal Article
Resource Relation:
Journal Name: Materials Research Bulletin; Journal Volume: 80; Other Information: Copyright (c) 2016 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ALUMINIUM NITRIDES; ALUMINIUM OXIDES; ANNEALING; EPITAXY; HEXAGONAL LATTICES; LAYERS; MONOCRYSTALS; SILICON; SILICON CARBIDES; SOLID SOLUTIONS; SUBSTRATES; TEMPERATURE DEPENDENCE; THIN FILMS; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION

Citation Formats

Cabioch, Thierry, E-mail: Thierry.cabioch@univ-poitiers.fr, Alkazaz, Malaz, Beaufort, Marie-France, Nicolai, Julien, Eyidi, Dominique, Eklund, Per, E-mail: Perek@ifm.liu.se, and Thin Film Physics Division, Linköping University, IFM, 581 83 Linköping. Ti{sub 2}AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers. United States: N. p., 2016. Web. doi:10.1016/J.MATERRESBULL.2016.03.031.
Cabioch, Thierry, E-mail: Thierry.cabioch@univ-poitiers.fr, Alkazaz, Malaz, Beaufort, Marie-France, Nicolai, Julien, Eyidi, Dominique, Eklund, Per, E-mail: Perek@ifm.liu.se, & Thin Film Physics Division, Linköping University, IFM, 581 83 Linköping. Ti{sub 2}AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers. United States. doi:10.1016/J.MATERRESBULL.2016.03.031.
Cabioch, Thierry, E-mail: Thierry.cabioch@univ-poitiers.fr, Alkazaz, Malaz, Beaufort, Marie-France, Nicolai, Julien, Eyidi, Dominique, Eklund, Per, E-mail: Perek@ifm.liu.se, and Thin Film Physics Division, Linköping University, IFM, 581 83 Linköping. Mon . "Ti{sub 2}AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers". United States. doi:10.1016/J.MATERRESBULL.2016.03.031.
@article{osti_22581585,
title = {Ti{sub 2}AlN thin films synthesized by annealing of (Ti+Al)/AlN multilayers},
author = {Cabioch, Thierry, E-mail: Thierry.cabioch@univ-poitiers.fr and Alkazaz, Malaz and Beaufort, Marie-France and Nicolai, Julien and Eyidi, Dominique and Eklund, Per, E-mail: Perek@ifm.liu.se and Thin Film Physics Division, Linköping University, IFM, 581 83 Linköping},
abstractNote = {Highlights: • Epitaxial thin films of the MAX phase Ti{sub 2}AlN are obtained by thermal annealing. • A new metastable (Ti,Al,N) solid solution with the structure of α-T is evidenced. • The formation of the MAX phase occurs at low temperature (600 °C). - Abstract: Single-phase Ti{sub 2}AlN thin films were obtained by annealing in vacuum of (Ti + Al)/AlN multilayers deposited at room temperature by magnetron sputtering onto single-crystalline (0001) 4H-SiC and (0001) Al{sub 2}O{sub 3} substrates. In-situ X-ray diffraction experiments combined with ex-situ cross-sectional transmission electron microscopy observations reveal that interdiffusion processes occur in the multilayer at a temperature of ∼400 °C leading to the formation of a (Ti, Al, N) solid solution, having the hexagonal structure of α-Ti, whereas the formation of Ti{sub 2}AlN occurs at 550–600 °C. Highly oriented (0002) Ti{sub 2}AlN thin films can be obtained after an annealing at 750 °C.},
doi = {10.1016/J.MATERRESBULL.2016.03.031},
journal = {Materials Research Bulletin},
number = ,
volume = 80,
place = {United States},
year = {Mon Aug 15 00:00:00 EDT 2016},
month = {Mon Aug 15 00:00:00 EDT 2016}
}