Skip to main content
U.S. Department of Energy
Office of Scientific and Technical Information

Fabrication of GaN nanowires on Pd-coated sapphire substrates by magnetron sputtering technique

Journal Article · · Materials Characterization
 [1]; ; ;  [1]
  1. Institute of Semiconductors, Shandong Normal University, Ji nan 250014 (China)
Large-scale GaN nanowires were successfully synthesized through ammoniating Ga{sub 2}O{sub 3}/Pd films sputtered on the sapphire(001) substrates. X-ray diffraction, scanning electron microscopy, high-resolution transmission electron microscopy, photoluminescence and Raman spectrum were used to characterize the specimens. The results demonstrate that nanowires are single crystal with hexagonal wurtzite structure and have good optical properties. Raman scattering appears broadened and asymmetric compared with those of bulk GaN due to its polycrystalline nature. In addition, the growth mechanism of GaN nanowires is briefly discussed.
OSTI ID:
22066196
Journal Information:
Materials Characterization, Journal Name: Materials Characterization Journal Issue: 4 Vol. 61; ISSN 1044-5803; ISSN MACHEX
Country of Publication:
United States
Language:
English