Fabrication of Bi{sub 2}Te{sub 3}/Sb{sub 2}Te{sub 3} and Bi{sub 2}Te{sub 3}/Bi{sub 2}Te{sub 2}Se multilayered thin film-based integrated cooling devices

Journal Article · Thu Jul 15 04:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3292600· OSTI ID:22053728

Xiao, Z; Hedgemen, K; Harris, M; DiMasi, E ^[1]

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1. Department of Electrical Engineering, Alabama A and M University, Normal, Alabama 35762 (United States)

In this article, the authors report on the development of solid-state integrated cooling devices using Bi{sub 2}Te{sub 3}/Sb{sub 2}Te{sub 3} and Bi{sub 2}Te{sub 3}/Bi{sub 2}Te{sub 2}Se thermoelectric thin films fabricated using sputtering deposition. The multilayer thin films have a periodic structure consisting of alternating Bi{sub 2}Te{sub 3} and Sb{sub 2}Te{sub 3} layers or Bi{sub 2}Te{sub 3} and Bi{sub 2}Te{sub 2}Se layers, where each layer is about 10 nm thick. The deposited Bi{sub 2}Te{sub 3}/Sb{sub 2}Te{sub 3} multilayer thin film has a p-type conductivity and the deposited Bi{sub 2}Te{sub 3}/Bi{sub 2}Te{sub 2}Se multilayer thin film has an n-type conductivity. The multilayer structure of films and the interface of layers were analyzed by x-ray diffraction and reflectivity. Bi{sub 2}Te{sub 3}/Sb{sub 2}Te{sub 3} and Bi{sub 2}Te{sub 3}/Bi{sub 2}Te{sub 2}Se multilayer thin film-based integrated cooling devices were fabricated using standard integrated circuit fabrication process. The temperature difference was measured from the fabricated cooling devices. The devices could be good candidates for the application of high-efficiency solid-state microcooling.

• OSTI ID: 22053728
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 28; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANTIMONY TELLURIDES
BISMUTH SELENIDES
BISMUTH TELLURIDES
DEPOSITION
EFFICIENCY
ELECTRIC CONDUCTIVITY
FABRICATION
INTEGRATED CIRCUITS
LAYERS
REFLECTIVITY
SPUTTERING
THIN FILMS
X-RAY DIFFRACTION