Lithium phosphorus oxynitride solid-state thin-film electrolyte deposited and modified by bias sputtering and low temperature annealing

Journal Article · Thu Jul 15 04:00:00 EDT 2010 · Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films

DOI:https://doi.org/10.1116/1.3435330· OSTI ID:22053724

Chiu, K -F; Chen, C C; Lin, K M; Lo, C C; Lin, H C; Ho, W -H; Jiang, C S ^[1]

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1. Department of Materials Science and Engineering, Feng Chia University, 100 Wen Hua Road, Taichung, Taiwan (China)

Amorphous lithium phosphorus oxynitride (LiPON) solid-state thin-film electrolyte has been deposited and characterized. The thin films were prepared by rf magnetron sputtering under various substrate biases. By fabricating under different substrate biases and applying low temperature annealing (473 K), the properties of the LiPON thin-film electrolytes and the electrolyte/cathode interfaces were modified. The ionic conductivity as high as 9.4x10{sup -4} S m{sup -1} can be obtained by depositing at optimal bias. The performances of the consequently fabricated SnO{sub 2}/LiPON/LiMn{sub 2}O{sub 4} all-solid-state lithium ion thin-film batteries were improved using the bias sputtering technique, due to the enhanced the ionic conductivity and uniform interface.

• OSTI ID: 22053724
• Journal Information: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films, Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films Journal Issue: 4 Vol. 28; ISSN 1553-1813
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANNEALING
CATHODES
DEPOSITION
ELECTROLYTES
IONIC CONDUCTIVITY
LITHIUM COMPOUNDS
LITHIUM IONS
MAGNETRONS
PHOSPHORUS NITRIDES
SOLIDS
SPUTTERING
TEMPERATURE RANGE 0065-0273 K
THIN FILMS
TIN OXIDES