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Properties of Lithium Phosphorus Oxynitride (Lipon) for 3D Solid-State Lithium Batteries

Journal Article · · Journal of Materials Research
 [1];  [1];  [1];  [1];  [2];  [2];  [2]
  1. ORNL
  2. Massachusetts Institute of Technology (MIT)
+ Show Author Affiliations
Abstract The thin film electrolyte known as Lipon has proven successful for planar thin film battery applications. Here the sputter deposition of the amorphous lithium phosphorous oxynitride electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10-100 m arrays of pores, columns and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted by the line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible for the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 1 S/cm
Research Organization:
Oak Ridge National Laboratory (ORNL)
Sponsoring Organization:
ORNL work for others; SC USDOE - Office of Science (SC)
DOE Contract Number:
AC05-00OR22725
OSTI ID:
988716
Journal Information:
Journal of Materials Research, Journal Name: Journal of Materials Research Journal Issue: 8 Vol. 25; ISSN 0884-2914
Country of Publication:
United States
Language:
English

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Related Subjects

25 ENERGY STORAGE
DEPOSITION
IONIC CONDUCTIVITY
LITHIUM COMPOUNDS
Lipon
METAL-NONMETAL BATTERIES
PHOSPHORUS COMPOUNDS
SPUTTERING
THIN FILMS
lithium battery
solid electrolyte