Effects of deposition condition on the ionic conductivity and structure of amorphous lithium phosphorus oxynitrate thin film
Thin film rechargeable lithium batteries, in forms of Li{vert_bar}Li{sup +} solid electrolyte{vert_bar}Li intercalation cathode, have been studied for their applications in electronic devices such as built-in power sources for RAM, CMOS chips and smart cards. Recently, it was reported that a new amorphous lithium electrolyte, lithium phosphorus oxynitride (LIPON), showed an ionic conductivity as high as 2.0 x 10{sup {minus}6} {Omega}{sup {minus}1} cm{sup {minus}1} at room temperature, and also excellent long term stability when in contact with lithium. In spite of the advantages of LIPON as a solid electrolyte for microbatteries, the influence of deposition parameters on the structure and ionic conductivity on the LIPON is not yet known. the objective of the present study is to examine the effect of deposition conditions on the ionic conductivity and structural change of the LIPON solid electrolyte films, and hence to elucidate the mechanism by which the incorporation of nitrogen into phosphate glass improves the Li{sup +} ionic conductivity of LIPON.
- Research Organization:
- Korea Advanced Inst. of Science and Technology, Taejon (KR)
- OSTI ID:
- 20023108
- Journal Information:
- Scripta Materialia, Vol. 42, Issue 1; Other Information: PBD: 17 Dec 1999; ISSN 1359-6462
- Country of Publication:
- United States
- Language:
- English
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